Simultaneous piston position and tilt angle sensing for large vertical displacement micromirrors by frequency detection inductive sensing

This paper presents a frequency detection based inductive eddy current sensing mechanism to simultaneously sense the piston position and tilt angle of the mirror plate of large vertical displacement micromirrors that exhibit piston scan ranges above 100 μm. This is accomplished by sensing the inductance change, and thus resonant frequency shift, of two microfabricated sensing coils packaged underneath the mirror plate. For demonstration purpose, the coils were paired with discrete circuit components to oscillate at 11.9 MHz and 12.5 MHz, respectively. The piston position and tilt angle of the mirror plate could be simultaneously monitored over a 500 μm piston scan range, achieving a maximum piston sensitivity of 4.15 kHz/μm with a piston sensing resolution of 96 nm and a maximum tilt angle sensitivity of 60.5 kHz/° with a tilt angle sensing resolution of 0.0013°. Analytical modeling of the coil inductance change via image theory was also conducted, showing that the sensor sensitivity and resolution could ...