Isotope effects on plasma species of Ar/H2/D2 plasmas

The authors studied the influence of isotopes on the Ar/H2 and Ar/D2 plasmas using Langmuir probe and ion mass analyzer measurements at several pressures relevant to low temperature plasma surface processing. As up to 50% H2 is added to Ar plasma, electron energy distribution functions show an increase in electron temperature (from 2.5 eV to 3 eV for 30 mTorr with 50% addition) and a decrease in electron density (2.5 × 1011 cm−3 → 2.5 × 1010 cm−3 at 30 mTorr with 50% addition). At lower pressures (5 and 10 mTorr), these effects are not as pronounced. This change in electron properties is very similar for Ar/D2 plasmas due to similar electron cross-sections for H2 and D2. Ion types transition from predominantly Ar+ to molecular ions ArH+/H3+ and ArD+/D3+ with the addition of H2 and D2 to Ar, respectively. At high pressures and for the heavier isotope addition, this transition to molecular ions is much faster. Higher pressures increase the ion–molecules collision induced formation of the diatomic and triato...

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