Simulation of an analog differential capacitive accelerometer

In this paper, the simulation of an open-loop MEMS capacitive accelerometer in OrCAD (PSPICE A/D), include readout interface are presented. The charge amplifier technique is used for converting the capacitance change of accelerometer to electrical signal. The sensing element is modelled in system behavioural level of PSPICE and the interface circuit is modelled at component level.

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