A flexible three-axial capacitive tactile sensor with multilayered dielectric for artificial skin applications

In this paper, a new flexible three-axial force sensor was designed and investigated, which was composed of four capacitors, and the mechanism was based on the capacitance change induced by an applying three-axial force. For the configuration of the electrodes, four sensing electrodes and a public electrode were in the same plane, which was based on fringe effect theory. Different from the traditional dielectric layer with single material, this multilayered dielectric consisted of both the air gap and polydimethylsiloxane. The structure of the multilayered dielectric changed under the external/applied force, leading to variation of dielectric constant ε, which caused the capacitance change. Measurement results showed that the full-scale range of detectable force was around 0–10 N for all three axes. The average sensitivities of the force sensor units were 0.0095, 0.0053, and 0.0060 N−1 for the normal, X-axis, and Y-axis shear forces, and more test proved its high potential for application in skin-like sensing field.

[1]  Klas Hjort,et al.  A comprehensive study of ion track enabled high aspect ratio microstructures in flexible circuit boards , 2004 .

[2]  Mami Tanaka,et al.  Development of a sensor system for collecting tactile information , 2007 .

[3]  Cheng-Hsin Chuang,et al.  Flexible tactile sensor array for foot pressure mappingsystem in a biped robot , 2012 .

[4]  S. Corbellini,et al.  Piezoresistive flexible composite for robotic tactile applications , 2014 .

[5]  Nan-Chyuan Tsai,et al.  Development of tactile sensors for simultaneous, detection of normal and shear stresses , 2010 .

[6]  C.-M. Tsao,et al.  The development of a highly twistable tactile sensing array with stretchable helical electrodes , 2011 .

[7]  Hyung-Kew Lee,et al.  Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors , 2008, Journal of Microelectromechanical Systems.

[8]  Kosuke Watanabe,et al.  Identification of various kinds of papers using multi-axial tactile sensor with micro-cantilevers , 2013, 2013 World Haptics Conference (WHC).

[9]  Isao Shimoyama,et al.  triaxial tactile sensor without crosstalk using pairs of piezoresistive beams ith sidewall doping , 2013 .

[10]  José Gerardo V. da Rocha,et al.  Capacitive Sensor for Three-Axis Force Measurements and Its Readout Electronics , 2009, IEEE Transactions on Instrumentation and Measurement.

[11]  Clément Gosselin,et al.  A flexible robot skin for safe physical human robot interaction , 2009, 2009 IEEE International Conference on Robotics and Automation.

[12]  Frank Clemens,et al.  Textile Pressure Sensor Made of Flexible Plastic Optical Fibers , 2008, Sensors.

[13]  Masahiro Ohka,et al.  Sensing characteristics of an optical three-axis tactile sensor under combined loading , 2004, Robotica.

[14]  S. Bütefisch,et al.  Micromechanical three-axial tactile force sensor for micromaterial characterisation , 2001 .

[15]  S. Tjin,et al.  Fiber Bragg grating based shear-force sensor: modeling and testing , 2004, Journal of Lightwave Technology.

[16]  Alessandro Massaro,et al.  Flexible nanocomposites with all-optical tactile sensing capability , 2014 .

[17]  Ming-Yih Lee,et al.  Development of a flexible PDMS capacitive pressure sensor for plantar pressure measurement , 2012 .

[18]  Xinchuan Liu,et al.  A highly sensitive pressure sensor using a Au-patterned polydimethylsiloxane membrane for biosensing applications , 2013 .

[19]  Lucia Beccai,et al.  Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger , 2011 .

[20]  Chun-Liang Lin,et al.  A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement , 2010, Sensors.

[21]  Hyung-Kew Lee,et al.  Iop Publishing Journal of Micromechanics and Microengineering Real-time Measurement of the Three-axis Contact Force Distribution Using a Flexible Capacitive Polymer Tactile Sensor , 2022 .

[22]  Nan Li,et al.  Parallel double-plate capacitive proximity sensor modelling based on effective theory , 2014 .