Surface micromachined glass and polysilicon microchannels using MUMPs

MUMPs (Multi-User MEMS Process) based, surface micromachined glass and polysilicon microchannels are fabricated by means of surface micromachining. The prototype glass microchannels are made of a 0.75 /spl mu/m-thick PSG2 layer on top with cross section of 70 /spl mu/m in width and 4 /spl mu/m in height. The polysilicon microchannel are made of a 2 /spl mu/m-thick poly I layer with a cross section of 7 /spl mu/m in width and 2 /spl mu/m in height. Both microchannels have been tested to transport and contain water by means of surface tension force. Because these microchannels are fabricated strictly from the foundry-based micromachining process, they present opportunities for economical prototyping process and provide great potential to be integrated with other micromachined microfluidic systems using foundry-based services for device applications, such as DNA chip and lab-on-a-chip.

[1]  Y. Zohar,et al.  Design, fabrication and characterization of an integrated micro heat pipe , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[2]  T. N. Stevenson,et al.  Fluid Mechanics , 2021, Nature.

[3]  D. Liepmann,et al.  Fabrication and performance testing of a steady thermocapillary pump with no moving parts , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[4]  Richard S. Muller,et al.  Lightweight, optically flat micromirrors for fast beam steering , 2000, 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399).

[5]  Albert P. Pisano,et al.  Silicon-processed microneedles , 1999 .

[6]  P. Kohl,et al.  Fabrication of air-channel structures for microfluidic, microelectromechanical, and microelectronic applications , 2001 .

[7]  Liwei Lin,et al.  A thermal-bubble-actuated micronozzle-diffuser pump , 2002 .

[8]  Yu-Chong Tai,et al.  Marching velocity of capillary meniscuses in microchannels , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[9]  R. Howe,et al.  Laterally driven polysilicon resonant microstructures , 1989 .

[10]  Christopher D. Batich,et al.  Fabrication and testing of a magnetically actuated micropump , 2002 .

[11]  A photochemical/chemical direct method of synthesizing high-performance deoxyribonucleic acid chips for rapid and parallel gene analysis , 2002 .

[12]  Firas Sammoura,et al.  Water-activated disposable and long shelf life microbatteries ☆ , 2004 .

[13]  Ring-Ling Chien,et al.  Multiport flow-control system for lab-on-a-chip microfluidic devices , 2001, Fresenius' journal of analytical chemistry.

[14]  Liwei Lin,et al.  Electrolyte based on-demand and disposable microbattery , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).