A hybrid silicon-parylene neural probe with locally flexible regions

Abstract This paper reports the development of flexible neural probes based on hybrid silicon–parylene structures. The chronic tissue response is a major obstacle for the clinical application of neural probes. Mechanical mismatch is considered to be one of the causes of chronic tissue response of implanted neural probes. Polymer probes have been developed to reduce the mechanical mismatch. However, the implantation of polymer probes is challenging. Here, we have proposed a novel hybrid silicon–parylene probe with locally flexible regions to address the mechanical mismatch without the implanting difficulty of traditional polymer probes. Prototypes have been developed and the buckling force has been experimentally measured. Penetrating experiments in agarose gel have been successfully demonstrated.

[1]  Christoph Weder,et al.  Development of a stimuli-responsive polymer nanocomposite toward biologically optimized, MEMS-based neural probes , 2011 .

[2]  Karen L. Smith,et al.  Ultrafast resorbing polymers for use as carriers for cortical neural probes. , 2011, Acta biomaterialia.

[3]  P. Renaud,et al.  Demonstration of cortical recording using novel flexible polymer neural probes , 2008 .

[4]  Jeffrey A. Loeb,et al.  Microfabrication of 3D neural probes with combined electrical and chemical interfaces , 2010 .

[5]  G. Gillies,et al.  A realistic brain tissue phantom for intraparenchymal infusion studies. , 2004, Journal of neurosurgery.

[6]  B A Wester,et al.  Development and characterization of in vivo flexible electrodes compatible with large tissue displacements , 2009, Journal of neural engineering.

[7]  D. Kipke,et al.  Long-term neural recording characteristics of wire microelectrode arrays implanted in cerebral cortex. , 1999, Brain research. Brain research protocols.

[8]  Kai-Nan An,et al.  Dynamic mechanical properties of agarose gels modeled by a fractional derivative model. , 2004, Journal of biomechanical engineering.

[9]  Karen Moxon.  Multichannel Electrode Design: Considerations for Different Applications , 1998 .

[10]  Ken Gall,et al.  In Vivo Penetration Mechanics and Mechanical Properties of Mouse Brain Tissue at Micrometer Scales , 2009, IEEE Transactions on Biomedical Engineering.

[11]  Kunihiko Mabuchi,et al.  Preliminary Study of Multichannel Flexible Neural Probes Coated with Hybrid Biodegradable Polymer , 2006, 2006 International Conference of the IEEE Engineering in Medicine and Biology Society.

[12]  John P. Donoghue,et al.  Connecting cortex to machines: recent advances in brain interfaces , 2002, Nature Neuroscience.

[13]  Justin C. Williams,et al.  Flexible polyimide-based intracortical electrode arrays with bioactive capability , 2001, IEEE Transactions on Biomedical Engineering.

[14]  Miguel A. L. Nicolelis,et al.  Brain–machine interfaces to restore motor function and probe neural circuits , 2003, Nature Reviews Neuroscience.

[15]  Jerald D. Kralik,et al.  Chronic, multisite, multielectrode recordings in macaque monkeys , 2003, Proceedings of the National Academy of Sciences of the United States of America.

[16]  Y. Chen,et al.  Design and fabrication of a polyimide-based microelectrode array: Application in neural recording and repeatable electrolytic lesion in rat brain , 2009, Journal of Neuroscience Methods.

[17]  Robert L. Rennaker,et al.  Fabrication of Responsive, Softening Neural Interfaces , 2012 .

[18]  T. Nichols,et al.  Flexible microelectrode arrays with integrated insertion devices , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[19]  E. M. Schmidt,et al.  Electrodes for Many Single Neuron Recordings , 1998 .

[20]  Cheng Lv,et al.  A robust polymer microcable structure for flexible devices , 2013 .

[21]  James P. Harris,et al.  Mechanically adaptive intracortical implants improve the proximity of neuronal cell bodies , 2011, Journal of neural engineering.

[22]  Ravi V. Bellamkonda,et al.  Dexamethasone-coated neural probes elicit attenuated inflammatory response and neuronal loss compared to uncoated neural probes , 2007, Brain Research.

[23]  A. Levey,et al.  Implanted neural electrodes cause chronic, local inflammation that is correlated with local neurodegeneration , 2009, Journal of neural engineering.

[24]  K. Mabuchi,et al.  Parylene flexible neural probes integrated with microfluidic channels. , 2005, Lab on a chip.

[25]  Andrew B Schwartz,et al.  Cortical neural prosthetics. , 2004, Annual review of neuroscience.

[26]  Winnie Jensen,et al.  In-vivo implant mechanics of flexible, silicon-based ACREO microelectrode arrays in rat cerebral cortex , 2006, IEEE Transactions on Biomedical Engineering.

[27]  K. Djupsund,et al.  Flexible polyimide microelectrode array for in vivo recordings and current source density analysis. , 2007, Biosensors & bioelectronics.

[28]  W. Olbricht,et al.  Fabrication and characterization of microfluidic probes for convection enhanced drug delivery. , 2006, Journal of controlled release : official journal of the Controlled Release Society.

[29]  Kensall D. Wise,et al.  Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage , 2007 .

[30]  W. Reichert.  Indwelling Neural Implants : Strategies for Contending with the In Vivo Environment , 2007 .

[31]  Jon A. Mukand,et al.  Neuronal ensemble control of prosthetic devices by a human with tetraplegia , 2006, Nature.

[32]  K. Mabuchi,et al.  3D flexible multichannel neural probe array , 2004 .

[33]  P. Tresco,et al.  Response of brain tissue to chronically implanted neural electrodes , 2005, Journal of Neuroscience Methods.

[34]  K. Horch,et al.  A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array , 1991, IEEE Transactions on Biomedical Engineering.

[35]  Daryl R Kipke,et al.  Advanced Neurotechnologies for Chronic Neural Interfaces: New Horizons and Clinical Opportunities , 2008, The Journal of Neuroscience.

[36]  Jessin Koshy John,et al.  3-dimensional intracortical neural interface for the study of epilepsy , 2012 .

[37]  D. Szarowski,et al.  Brain responses to micro-machined silicon devices , 2003, Brain Research.

[38]  R. Wm.  A Molecular Perspective on Understanding and Modulating the Performance of Chronic Central Nervous System (CNS) Recording Electrodes -- Indwelling Neural Implants: Strategies for Contending with the In Vivo Environment , 2008 .

[39]  O. B. Ozdoganlar,et al.  An ultra-compliant, scalable neural probe with molded biodissolvable delivery vehicle , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[40]  R. Normann,et al.  Chronic recording capability of the Utah Intracortical Electrode Array in cat sensory cortex , 1998, Journal of Neuroscience Methods.

[41]  D. J. Warren,et al.  A neural interface for a cortical vision prosthesis , 1999, Vision Research.