论文信息 - Effect of energetic ions on plasma damage of porous SiCOH low-k materials - 字舞流文

Effect of energetic ions on plasma damage of porous SiCOH low-k materials

A. Franquet | D. Shamiryan | H. Struyf | E. Kunnen | W. Boullart | M. Baklanov | T. Rakhimova | A. Urbanowicz