Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
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Robin H. A. Ras | A. A. Malygin | C. Hwang | M. Leskelä | J. R. Ommen | T. Seidel | C. Wiemer | T. Sajavaara | T. Törndahl | T. Kallio | F. Roozeboom | L. Lamagna | M. Bechelany | Rong Chen | Geert Rampelberg | A. Devi | H. Savin | Y. Koshtyal | J. Sundqvist | E. Rauwel | A. Krause | R. Puurunen | M. Norek | K. Grigoras | R. Ras | A. Akbashev | N. Schneider | S. Jen | J. Molarius | H. Lipsanen | G. Gottardi | F. Piallat | O. Ylivaara | E. Ahvenniemi | M. Chubarov | D. Hausmann | Do Han Kim | D. Suyatin | I. Kärkkänen | D. Cameron | Saima Ali | I. Khmelnitskiy | Adam Łapicki | H. Salami | H. Pedersen | M. Kääriäinen | A. Malkov | L. Klibanov | J. Kanervo | G. Popov | V. Cremers | S. Boyadjiev | J. Lyytinen | Jakob Kuhs | Tommi O. Kääriäinen | O. Yurkevich | V. Drozd | Christian Militzer | M. Berdova | L. Elnikova | Abdelkader Mennad | Çaǧla Özgit-Akgün | M. Panov | T. Kääriäinen | Véronique Cremers
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