Vibration-energy-harvesting properties of hydrothermally synthesized (K,Na)NbO3 films deposited on flexible metal foil substrates

Energy-harvesting properties were investigated for the flexible piezoelectric devices, Pt/hydrothermally synthesized (K0.88Na0.12)NbO3/SrRuO3/metal foil, fabricated at low process temperatures below 300 °C. Fabricated devices had high flexibility, and cracking and peeling were not observed under the bending condition with the maximum curvature of 5.2 mm. The estimated Young’s modulus of the fabricated flexible devices was 37 GPa. The pulse poling treatment with AC voltage above 150 V enhanced the energy-harvesting properties. Although the dielectric constant was almost unchanged (εr = 120 at 200 Hz), the maximum output voltage measured at an acceleration of 10 m/s2 was observed at a resonance frequency of 126 Hz, and this voltage increased from 7.2 to 11 V after pulse poling treatment at 200 V. The maximum output power was 7.7 µW at a load resistance of 560 kΩ. The calculated Q and K2 values were 30 and 0.0014, respectively. The power density was 1.8 µW/(G2·mm3), which is higher than the previous reports for films and sintered bodies of (KxNa1−x) fabricated above 500 °C.

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