High Q CMOS-MEMS resonators and its applications as RF tunable band-pass filters
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G. Abadal | J. Verd | N. Barniol | A. Uranga | G. Murillo | F. Torres | J. Giner | E. Marigo | G. Abadal | A. Uranga | F. Torres | N. Barniol | J. Verd | E. Marigó | J. Giner | J. L. Lopez | G. Murillo
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