Nanoelectronic and nanomechanical systems

Nanomechanical systems, integrated with nanoelectronic transducers and sensors, are in an early stage of development. Research is focused on the development of radiofrequency mechanical resonators, sensitive electrometers and magnetometers, and potentially quantum-limited energy and motion sensors. This paper will review the current state of our efforts in this area, and will describe research in which the integration of mechanics and electronics will potentially allow the demonstration of macroscopic quantum effects in mechanical systems. We are particularly interested in observing and measuring quantum-limited systems, whose behavior is strongly affected by the measurement system; such systems may provide further insight into the quantum measurement process.

[1]  M. Roukes,et al.  Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals , 1996 .

[2]  Ark-Chew Wong,et al.  VHF free-free beam high-Q micromechanical resonators , 2000, Journal of Microelectromechanical Systems.

[3]  Michel H. Devoret,et al.  Amplifying quantum signals with the single-electron transistor , 2000, Nature.

[4]  J. M. Worlock,et al.  Measurement of the quantum of thermal conductance , 2000, Nature.

[5]  N. C. van der Vaart,et al.  Photon Sidebands of the Ground State and First Excited State of a Quantum Dot , 1997 .

[6]  Andrew G. Glen,et al.  APPL , 2001 .

[7]  Andrew Cleland,et al.  Thermal conductance of nanostructured phononic crystals , 2001 .

[8]  M. Roukes,et al.  Noise processes in nanomechanical resonators , 2002 .

[9]  R. Schoelkopf,et al.  The radio-frequency single-electron transistor (RF-SET): A fast and ultrasensitive electrometer , 1998, Science.

[10]  Milan Pophristic,et al.  Single-crystal aluminum nitride nanomechanical resonators , 2001 .

[11]  M. C. Cross,et al.  Effect of surface roughness on the universal thermal conductance , 2001 .

[12]  G. Kirczenow,et al.  Quantized Thermal Conductance of Dielectric Quantum Wires , 1998, cond-mat/9801238.

[13]  K. Schwab Quantum measurement with nanomechanical systems , 2001 .

[14]  M. Roukes,et al.  A nanometre-scale mechanical electrometer , 1998, Nature.

[15]  Miles P. Blencowe,et al.  Sensitivity of a micromechanical displacement detector based on the radio-frequency single-electron transistor , 2000 .

[16]  L. Solymar,et al.  Superconductive tunnelling and applications , 1972 .

[17]  M. P. Blencowe Quantum energy flow in mesoscopic dielectric structures , 1999 .