Parametri cAnalysistoDeter mineAccurateInte rconnectExtracti on Corners for Design Performance

In this paper we propose a technique to de- termine accurate interconnect extraction corners for a 65- nm design using parametric RC extraction and timing anal- ysis. We calculate the sensitivity of a design metric such as hold slack to each interconnect variation parameter. These sensitivities are then sorted for a selected number of criti- cal paths. Finally, we utilize this information to determine theparameterswhi chleadtoextracti oncornercasesint he design. The results has shown that parametric analysis is necessary for a better interconnect variation coverage in the design.