Real-time gas analysis using mid-infrared microcavities
暂无分享,去创建一个
In-situ gas analysis was demonstrated using a mid-infrared (mid-IR) microcavity. Optical apertures were made of ultrathin silicate membranes using the complementary metal-oxide-semiconductor (CMOS) process. Fourier transform infrared spectroscopy (FTIR) shows that the silicate membrane is transparent in the range 2.5 - 6.0 μm, overlapping with gas absorption lines and therefore enables gas detection applications. CH4, CO2, and N2O were selected as analytes due to their strong absorption bands corresponding to functional group stretching: C-H, C-O, and O-N, respectively. A short response time of subsecond and high accuracy of gas identification were achieved. The chip-scale mid-IR sensor is a new platform for an in-situ, remote, and embedded gas monitoring system.
[1] Pao Tai Lin,et al. Air-clad silicon pedestal structures for broadband mid-infrared microphotonics. , 2013, Optics letters.
[2] Pao Tai Lin,et al. Chip-scale Mid-Infrared chemical sensors using air-clad pedestal silicon waveguides. , 2013, Lab on a chip.
[3] Pao Tai Lin,et al. Label‐Free Glucose Sensing Using Chip‐Scale Mid‐Infrared Integrated Photonics , 2016 .
[4] Hao-Yu Greg Lin,et al. Monolithic Mid-Infrared Integrated Photonics Using Silicon-on-Epitaxial Barium Titanate Thin Films. , 2017, ACS applied materials & interfaces.