Electrical Properties of 100 nm Pitch Cr/Au Fine Electrodes with 40 nm Width on GaInAs.

The electrical properties of Cr/Au electrodes with fine-pitch and small contact area are reported. Using three wire electrodes of 100 nm-pitch, 20 nm thickness, 4 µm length and 40 nm width, contact currents through the metal-semiconductor junction with area of 40 nm ×500 nm were measured. The current passing through each metal wire was measured to show the connection of the wire. The contact size dependence of the current characteristics was also investigated. As the contact size is reduced, the contact resistance per area at 0 V was found to increase.