论文信息 - Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films - 字舞流文

Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films

E. Tentardini | W. W. Batista | V. Soares | A. R. Terto | D.A.R. Fernandez | B.S.S. Brito | Ikaro Arthur Dantas Santos | A. R. Terto | G. B. de Oliveira | Roberto Hübler | W. W. Batista | E. K. Tentardini | Ikaro Arthur Dantas Santos | G. B. Oliveira