论文信息 - P‐29: Erosion Calculation for Sputtering Cathodes

P‐29: Erosion Calculation for Sputtering Cathodes

Monte Carlo simulations were performed to examine the plasma in sputter magnetrons. The motion of electrons is traced by using realistic magnetic fields. Ionization of Ar due to collision with electrons is include in the model. The distribution of the ionization density is used to calculate the target erosion profile.

[1] T. Nomura,et al. An anomalous erosion of a rectangular magnetron system , 2000 .

[2] William H. Press,et al. Numerical recipes , 1990 .

[3] Matthew Goeckner,et al. Model of energetic electron transport in magnetron discharges , 1990 .

[4] E. W. McDaniel,et al. Collision phenomena in ionized gases , 1964 .

[5] S. Ido,et al. Computational Studies on the Shape and Control of Plasmas in Magnetron Sputtering Systems , 1993 .

[6] Nahar,et al. Elastic scattering of positrons and electrons by argon. , 1987, Physical review. A, General physics.

[7] S. Ido,et al. Simulations of Electron Orbits in a Bucket-Type Ion Source , 1993 .