Performance characterization of rf‐driven multicusp ion sources

Radio‐frequency (rf)‐driven multicusp ion sources have been developed extensively at Lawrence Berkeley National Laboratory (LBNL) for many applications, each requiring specific source designs. These uses have ranged from large ion sources for neutral‐beam injectors—several tens of centimeters in size—to small sources for oil‐well logging neutron tubes—a few centimeters in diameter. The advantages associated with internal antenna, rf‐driven ion sources include reliability, long component life, ease of operation, and the ability to generate plasmas free of the impurities commonly found in hot‐filament discharge sources. We have investigated and characterized the performance of rf‐driven sources with respect to the rf operating frequency and ion source size for hydrogen ion species and current density. Furthermore, we have included in this study the aspects of proper coupling of the rf generator to the antenna through an impedance matching network. Finally, critical issues pertaining to general rf operation ...