论文信息 - Microprofile formation by thermal oxidation of molybdenum films

Microprofile formation by thermal oxidation of molybdenum films

The possibility of forming a microprofile in diffractive optical elements by thermal oxidation of thin molybdenum films is analyzed. It is shown that the gain in the thickness of a starting film in the thermal oxidation process may reach a threefold value, with the optical quality of the surface preserved.

Nikolay L. Kazanskiy | O. Yu. Moiseev | S. D. Poletayev | N. L. Kazanskiy | O. Moiseev

[1] J. Dekker,et al. Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition , 2006 .

[2] P. Maass. Corrosion and Corrosion Protection , 2011 .

[3] J Ihlemann,et al. Fabrication of diffractive phase elements for the UV-range by laser ablation patterning of dielectric layers , 2002 .

[4] S. Fu,et al. Low-cost lithographic fabrication of relief patterns in a SiO2-TiO2 hybrid Sol-Gel glass on curved surfaces , 2006 .

[5] E. Astrova,et al. Zigzag structures obtained by anisotropic etching of macroporous silicon , 2013 .

[6] Nikolay L. Kazanskiy,et al. Thermal oxidative degradation of molybdenum films under laser ablation , 2015 .