An optimizing finite difference scheme based on proper orthogonal decomposition for CVD equations

SUMMARY In this article, an optimizing reduced finite difference scheme (FDS) based on singular value decomposition (SVD) and proper orthogonal decomposition (POD) for the chemical vapor deposit (CVD) equations is presented. And the error estimates between the usual finite difference solution and the reduced POD solution of optimizing FDS are derived. At last, some examples of numerical simulation are given to demonstrate the consistency of the numerical and theoretical results. It is shown that the optimizing reduced FDS based on POD method is of great feasibility and efficiency. Copyright q 2009 John Wiley & Sons, Ltd.

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