Voltage Control of the Resonance Frequency of Dielectric Electroactive Polymer (DEAP) Membranes
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M. Dadras | P. Dubois | H. Shea | S. Rosset | M. Niklaus | M. Dadras | H. Shea | P. Dubois | S. Rosset | M. Niklaus | Philippe Dubois | Herbert Shea
[1] Samuel Rosset,et al. Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes , 2006 .
[2] J. Moehlis,et al. Linear and Nonlinear Tuning of Parametrically Excited MEMS Oscillators , 2007, Journal of Microelectromechanical Systems.
[3] Y. Ju,et al. Brownian Microscopy for Simultaneous In Situ Measurements of the Viscosity and Velocity Fields in Steady Laminar Microchannel Flows , 2008, Journal of Microelectromechanical Systems.
[4] Joost J. Vlassak,et al. A new bulge test technique for the determination of Young’s modulus and Poisson’s ratio of thin films , 1992 .
[5] R. E. D. Bishop,et al. Vibration Problems in Engineering, 4th Edition. S. P. Timoshenko, D. H. Young and W. Weaver. Wiley, Chichester. 1974. 538 pp. Illustrated. £8.95. , 1975, The Aeronautical Journal (1968).
[6] João Pedro Conde,et al. Electrostatically actuated polymer microresonators , 2005 .
[7] C. Nguyen,et al. MEMS technology for timing and frequency control , 2005, Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005..
[8] R. Pelrine,et al. Electrostriction of polymer dielectrics with compliant electrodes as a means of actuation , 1998 .
[9] Peter Sommer-Larsen,et al. Performance of dielectric elastomer actuators and materials , 2002, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.
[10] A. Pisano,et al. Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators , 2007, Journal of Microelectromechanical Systems.
[11] Ron Pelrine,et al. Mechatronic system of dielectric elastomer actuators addressed by thin film photoconductors on plastic , 2004 .
[12] Samuel Rosset,et al. Mechanical Characterization of a Dielectric Elastomer Microactuator With Ion-Implanted Electrodes , 2008 .
[13] M. Blencowe. Nanoelectromechanical systems , 2005, cond-mat/0502566.
[14] Bernhard E. Boser,et al. Parallel-Plate Driven Oscillations and Resonant Pull-In , 2002 .
[15] Y. Suzuki,et al. Microelectrostrictive Actuator With Large Out-of-Plane Deformation for Flow-Control Application , 2007, Journal of Microelectromechanical Systems.
[16] M. Roukes,et al. Ultrasensitive nanoelectromechanical mass detection , 2004, cond-mat/0402528.
[17] O. Paul,et al. Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long $\hbox{Si}_{3}\hbox{N}_{4}$ and $\hbox{SiO}_{2}/\hbox{Si}_{3}\hbox{N}_{4}$ Diaphragms , 2008, Journal of Microelectromechanical Systems.
[18] Danilo De Rossi,et al. Dielectric elastomer cylindrical actuators: electromechanical modelling and experimental evaluation , 2004 .
[19] M. Dadras,et al. Microactuators based on ion-implanted dielectric electroactive polymer membranes (EAP) , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
[20] S. Senturia. Microsystem Design , 2000 .
[21] M. Sepaniak,et al. Cantilever transducers as a platform for chemical and biological sensors , 2004 .
[22] E. P. Popov,et al. Introduction to Mechanics of Solids , 1968 .
[23] L. Nicu,et al. A Microcantilever-Based Picoliter Droplet Dispenser With Integrated Force Sensors and Electroassisted Deposition Means , 2008, Journal of Microelectromechanical Systems.
[24] Joost J. Vlassak,et al. Measuring the Mechanical Properties of Thin Metal Films by Means of Bulge Testing of Micromachined Windows , 1994 .
[25] E. Itoh,et al. AC electrical breakdown and conduction in PMMA thin films and the influence of LiClO/sub 4/ as an ionic impurity , 2004, Proceedings of the 2004 IEEE International Conference on Solid Dielectrics, 2004. ICSD 2004..
[26] Ji-Liang Doong,et al. Vibrations of an initially stressed transversely isotropic circular thick plate , 1984 .
[27] Sheng-Shian Li,et al. Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps , 2005, Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005..
[28] P. Dubois,et al. Performance characterization of miniaturized dielectric elastomer actuators fabricated using metal ion implantation , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
[29] F. J. Ramirez-Fernandez,et al. Silicon Field-Emission Devices Fabricated Using the Hydrogen Implantation–Porous Silicon (HI–PS) Micromachining Technique , 2008, Journal of Microelectromechanical Systems.
[30] Yoseph Bar-Cohen,et al. Electroactive polymers: current capabilities and challenges , 2002, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.
[31] João Pedro Conde,et al. Electrostatically actuated bilayer polyimide-based microresonators , 2007 .
[32] Samuel Rosset,et al. Mechanical properties of electroactive polymer microactuators with ion-implanted electrodes , 2007, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.
[33] Noel C. MacDonald,et al. Capacitance based tunable resonators , 1998 .
[34] Steven Ashley,et al. Artificial muscles. , 2003, Scientific American.
[35] Thomas W. Kenny,et al. Temperature-compensated high-stability silicon resonators , 2007 .
[36] C.T.-C. Nguyen,et al. Series-resonant VHF micromechanical resonator reference oscillators , 2004, IEEE Journal of Solid-State Circuits.
[37] Wolfgang Beitz,et al. Handbook of mechanical engineering , 1994 .
[38] R. Pelrine,et al. DESIGN AND PERFORMANCE OF AN ELECTROSTRICTIVE-POLYMER-FILM ACOUSTIC ACTUATOR , 1998 .