반도체 생산 성능 향상 및 다양한 이송패턴을 수행할 수 있는 범용 스케줄러 알고리즘에 관한 연구

Existing research about automated wafer transport management strategy for semiconductor manufacturing equipment was mainly focused on dispatching rules which is optimized to specific system layout, process environment or transfer patterns. But these methods can cause problem as like requiring additional rules or changing whole transport management strategy when applied to new type of process or system. In addition, a lack of consideration for interconnectedness of the added rules can cause unexpected deadlock. In this study, in order to improve these problems, propose dynamic priority based transfer job decision making algorithm which is applicable with regardless of system lay out and transfer patterns. Also, extra rule handling part proposed to support special transfer requirement which is available without damage to generality for maintaining a consistent scheduling policies and minimize loss of stability due to expansion and lead to improve productivity at the same time. Simulation environment of Twin-slot type semiconductor equipment was built In order to measure performance and examine validity about proposed wafer scheduling algorithm.