论文信息 - Plasma enhanced atomic layer deposition of molybdenum oxide from Mo(CO)6 and O2 plasma for 2D electronic device application - 字舞流文

Plasma enhanced atomic layer deposition of molybdenum oxide from Mo(CO)6 and O2 plasma for 2D electronic device application

David-Wei Zhang | Qingqing Sun | P. Zhou | Lin Chen | S. Ding | Mao-Lin Shi | Ya-Wei Dai | Jing Xu | Q. Cao