Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced variations in device dimensions from layout and deviations in material properties from the known nominal value. An experiment-based analytical model is used to compute the required electrostatic forces required to simulate external accelerations allowing the electro-mechanical calibration of the accelerometer. Measurements on fabricated devices confirm the validity of the proposed technique and electro-mechanical calibration is experimentally demonstrated.

[1]  H. V. Allen,et al.  Accelerometer systems with self-testable features , 1989 .

[2]  Khalil Najafi,et al.  Internal stress compensation and scaling in ultrasensitive silicon pressure sensors , 1992 .

[3]  S. Senturia,et al.  M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures , 1997 .

[4]  Andrew Richardson,et al.  Integrating testability into microsystems , 1997 .

[5]  Salvador Mir,et al.  Generation of Electrically Induced Stimuli for MEMS Self-Test , 2001, J. Electron. Test..

[6]  Robert Puers,et al.  RASTA—real-acceleration-for-self-test accelerometer: a new concept for self-testing accelerometers , 2002 .

[7]  S.D. Senturia.  Perspectives on MEMS, past and future: the tortuous pathway from bright ideas to real products , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[8]  Reinoud F. Wolffenbuttel,et al.  Stability of a micromechanical pull-in voltage reference , 2003, IEEE Trans. Instrum. Meas..

[9]  L. Rocha,et al.  Analysis and analytical modeling of static pull-In with application to MEMS-based voltage reference and process monitoring , 2004, Journal of Microelectromechanical Systems.

[10]  Wen-Ben Jone,et al.  A dual-mode built-in self-test technique for capacitive MEMS devices , 2004, 22nd IEEE VLSI Test Symposium, 2004. Proceedings..

[11]  Jason V. Clark,et al.  Practical Techniques for Measuring MEMS Properties , 2004 .

[12]  Salvador Mir,et al.  Built-in-self-test techniques for MEMS , 2006, Microelectron. J..

[13]  Xiaoqing Wen,et al.  VLSI Test Principles and Architectures: Design for Testability (Systems on Silicon) , 2006 .

[14]  W. De Raedt,et al.  Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes , 2007, Journal of Microelectromechanical Systems.

[15]  Reinoud F. Wolffenbuttel,et al.  A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization , 2008, VLSI Design.

[16]  Jarmo Takala,et al.  A Programmable Max-Log-MAP Turbo Decoder Implementation , 2008, VLSI Design.