论文信息 - Micro-optics for sensor applications

Micro-optics for sensor applications

Our investigation is focused on microlens arrays for microsystems and sensor applications. Arrays of refractive lenses (2 micrometer to 5 mm lens diameter) have been fabricated by melting resist technology. Microlens arrays have been transferred in fused silica (reactive ion etching) and replicated in polycarbonate and polymer (embossing, casting). Lens arrays have been integrated into lithographic systems, sensors and neural networks.

Reinhard Voelkel | Rene Daendliker | Hans Peter Herzig | Philippe Nussbaum

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