Overview of wire bonding using copper wire or insulated wire

Wire bonding using copper or insulated wire leads to many advantages and new challenges. Research is intensively performed worldwide, leading to many new findings and solutions. This article reviews recent advances in wire bonding using copper wire or insulated wire for advanced microelectronics packaging. Journal articles, conference articles and patents published or issued recently are reviewed. The benefits and problems/challenges related to wire bonding using copper wire or insulated wire such as wire open and short tail defects, poor bondability for stitch/wedge bonds, oxidation of Cu wire, and stiff wire on weak support structures, are briefly analyzed. A number of solutions to the problems and recent findings/developments related to wire bonding using copper wire or insulated wire are discussed. With the references provided, readers may explore more deeply by reading the original articles and patent documents.

[1]  A.G.K. Viswanath,et al.  Numerical Study of Gold Wire Bonding Process on Cu/Low-k Structures , 2007, IEEE Transactions on Advanced Packaging.

[2]  Sylvain Maitrejean,et al.  Dependence of CMP-induced delamination on number of low-k dielectric films stacked , 2006 .

[3]  Zhaowei Zhong,et al.  FLIP CHIP ON FR-4, CERAMICS AND FLEX , 2000 .

[4]  Zhaowei Zhong,et al.  Wire bonding of low‐k devices , 2008 .

[5]  E. Beyne,et al.  Mechanical FEM Simulation of bonding process on Cu lowK wafers , 2004, IEEE Transactions on Components and Packaging Technologies.

[6]  Abhishek Bhattacharyya,et al.  Effect of strain rate on deformation texture in OFHC copper , 2005 .

[7]  F. Iacopi,et al.  Challenges for structural stability of ultra-low- k -based interconnects , 2004 .

[8]  S. Chhun,et al.  Cu surface treatment influence on Si adsorption properties of CuSiN self-aligned barriers for sub-65nm technology node , 2006 .

[9]  Z. Zhong,et al.  A new bonding-tool solution to improve stitch bondability , 2007 .

[10]  Zhaowei Zhong,et al.  Board level solder joint reliability analysis and optimization of pyramidal stacked die BGA packages , 2004, Microelectron. Reliab..

[11]  Laurent-Luc Chapelon,et al.  New techniques to characterize properties of advanced dielectric barriers for sub-65nm technology node , 2006 .

[12]  Yasuo Marumo,et al.  Deformation analysis of Au wire bonding , 2006 .

[13]  F. Yazdani Signal integrity characterization of microwave XFP ASIC BGA package realized on low-K liquid crystal polymer (LCP) substrate , 2006, IEEE Transactions on Advanced Packaging.

[14]  Quoc Toan Le,et al.  Quantification of processing damage in porous low dielectric constant films , 2006 .

[15]  Bart Vandevelde,et al.  Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and micro-systems , 2007, Microelectron. Reliab..

[16]  Periannan Arulvanan,et al.  Effects of process conditions on reliability, microstructure evolution and failure modes of SnAgCu solder joints , 2006, Microelectron. Reliab..

[17]  Y. Zhou,et al.  Iterative optimization of tail breaking force of 1mil wire thermosonic ball bonding processes and the influence of plasma cleaning , 2007, Microelectron. J..

[18]  Michael Mayer,et al.  In Situ Studies of the Effect of Ultrasound During Deformation on Residual Hardness of a Metal , 2009 .

[19]  Li-Hui Chen,et al.  Recrystallization, Electric Flame-Off Characteristics, and Electron Backscatter Diffraction of Copper Bonding Wires , 2010, IEEE Transactions on Advanced Packaging.

[20]  Jie-Hua Zhao,et al.  Application of virtual crack closure integral method for interface cracks in low-k integrated circuit devices under thermal load , 2005 .

[21]  K. M. Chen,et al.  Reliability Evaluation of BOAC and Normal Pad Stacked-Chip Packaging Using 90nm Low-K Wafers , 2006, 2006 International Conference on Electronic Materials and Packaging.

[22]  Zhaowei Zhong,et al.  Comprehensive board-level solder joint reliability modeling and testing of QFN and PowerQFN packages , 2003, Microelectron. Reliab..

[23]  Changsoo Jang,et al.  A numerical failure analysis on lead breakage issues of ultra fine pitch flip chip-on-flex and tape carrier packages during chip/film assembly process , 2006, Microelectron. Reliab..

[24]  Zhaowei Zhong Wire bonding using insulated wire and new challenges in wire bonding , 2008 .

[25]  Zhaowei Zhong Wire bonding using copper wire , 2009 .

[26]  R. Boudreau Foreword contributions from the 50th electronic components and technology conference , 2001 .

[27]  Michael Mayer,et al.  Comparison of Insulated with Bare Au Bonding Wire: HAZ Length, HAZ Breaking Force, and FAB Deformability , 2009 .

[28]  S.-L. Fu 2008 3rd International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2008: Welcome message from Shen-Li Fu, Conference general chair , 2008 .

[29]  Vidosav D. Majstorović,et al.  Multi-response optimisation of thermosonic copper wire-bonding process with correlated responses , 2009 .

[30]  Zhaowei Zhong,et al.  Finite element analysis of a three‐dimensional package , 2003 .

[31]  C. D. Breach,et al.  A brief review of selected aspects of the materials science of ball bonding , 2010, Microelectron. Reliab..

[32]  Sun Jun,et al.  Finite element analysis of a IBM suspension integrated with a PZT microactuator , 2002 .

[33]  Jaroslav Mackerle,et al.  Coatings and surface modification technologies: a finite element bibliography (1995–2005) , 2005 .

[34]  Zhaowei Zhong,et al.  Board level solder joint reliability analysis of stacked die mixed flip-chip and wirebond BGA , 2006, Microelectron. Reliab..

[35]  Serguei Stoukatch,et al.  Mechanical reliability of Au and Cu wire bonds to Al, Ni/Au and Ni/Pd/Au capped Cu bond pads , 2006, Microelectron. Reliab..

[36]  Z. Zhong,et al.  Study of factors affecting the hardness of ball bonds in copper wire bonding , 2007 .

[37]  Wayne D. Kaplan,et al.  Detailed investigation of ultrasonic Al–Cu wire-bonds: I. Intermetallic formation in the as-bonded state , 2008, Journal of Materials Science.

[38]  C. J. Vath,et al.  Fundamentals of thermo-sonic copper wire bonding in microelectronics packaging , 2007 .

[39]  J. Michelon,et al.  Challenges in the implementation of low-k dielectrics in the back-end of line , 2005 .

[40]  I. De Wolf,et al.  Mechanical issues of Cu-to-Cu wire bonding , 2004, IEEE Transactions on Components and Packaging Technologies.

[41]  Z. Zhong,et al.  Two capillary solutions for ultra-fine-pitch wire bonding and insulated wire bonding , 2007 .

[42]  Stefan Schulz,et al.  Cu/barrier CMP on porous low-k based interconnect schemes , 2006 .

[43]  Willem D. van Driel,et al.  Facing the challenge of designing for Cu/low-k reliability , 2006, Microelectronics and reliability.

[44]  Z. Zhong,et al.  Development of capillaries for wire bonding of low-k ultra-fine-pitch devices , 2006 .

[45]  L. Levine,et al.  Reliability ground rules change at <50 /spl mu/m pitch , 2003, IEEE/CPMT/SEMI 28th International Electronics Manufacturing Technology Symposium, 2003. IEMT 2003..

[46]  Li-Hui Chen,et al.  Recrystallization Effect and Electric Flame-Off Characteristic of Thin Copper Wire , 2006 .

[47]  M. Meyer,et al.  Role of process parameters on bondability and pad damage indicators in copper ball bonding , 2011, Microelectron. Reliab..

[48]  Yongjin Guo,et al.  Numerical Study on the Effects of Bond Parameters on Thermosonic Bond Strength , 2007, 2007 8th International Conference on Electronic Packaging Technology.

[49]  J. Oberhammer,et al.  BCB contact printing for patterned adhesive full-wafer bonded 0-level packages , 2005, Journal of Microelectromechanical Systems.

[50]  B. Hoefflinger ITRS: The International Technology Roadmap for Semiconductors , 2011 .

[51]  V. Fiori,et al.  Gold Wire Bonding Induced Peeling in Cu/Low-k Interconnects: 3D Simulation and Correlations , 2007, 2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems. EuroSime 2007.

[52]  Ieee Component,et al.  2009 International Conference on Electronic Packaging Technology & High Density Packaging , 2009 .

[53]  Mahesh Shah,et al.  Surface Oxide evolution on Al-Si bond wires for high-power RF applications , 2004 .

[54]  Azhar Aripin,et al.  Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium: Foreword , 2006 .

[55]  S. Kaimori,et al.  The development of Cu bonding wire with oxidation-resistant metal coating , 2006, IEEE Transactions on Advanced Packaging.

[56]  J. Meindl,et al.  Sea-of-leads MEMS I/O interconnects for low-k IC packaging , 2006, Journal of Microelectromechanical Systems.

[57]  M. Mayer,et al.  Low-Stress Thermosonic Copper Ball Bonding , 2009, IEEE Transactions on Electronics Packaging Manufacturing.

[58]  Narasimalu Srikanth,et al.  Effect of indenter shapes on bond pad hardness studies of low-k devices , 2008 .

[59]  Michael Mayer,et al.  Microelectronic Wire Bonding with Insulated Au Wire : Effects of Process Parameters on Insulation Removal and Crescent Bonding , 2008 .

[60]  Marc G. D. Geers,et al.  Cohesive zone modeling for structural integrity analysis of IC interconnects , 2007, Microelectron. Reliab..

[61]  Ivan Kassamakov,et al.  Scanning white light interferometry in quality control of single-point tape automated bonding , 2007 .

[62]  Narasimalu Srikanth,et al.  Effect of wire diameter on the thermosonic bond reliability , 2006, Microelectron. Reliab..

[63]  He Guiming,et al.  1000Base-T SFP , 2003, Proceedings of the 5th Electronics Packaging Technology Conference (EPTC 2003).

[64]  Li-Hui Chen,et al.  Electric Flame-Off Characteristics and Fracture Properties of 20 μm Thin Copper Bonding Wire , 2009 .

[65]  G. Q. Zhang,et al.  Analysis of Cu/low-k bond pad delamination by using a novel failure index , 2005, EuroSimE 2005. Proceedings of the 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005..

[66]  M. Mayer,et al.  Concurrent Optimization of Crescent Bond Pull Force and Tail Breaking Force in a Thermosonic Cu Wire Bonding Process , 2009, IEEE Transactions on Electronics Packaging Manufacturing.

[67]  Chunqing Wang,et al.  Investigation of ultrasonic copper wire wedge bonding on Au/Ni plated Cu substrates at ambient temperature , 2008 .

[68]  Michael Mayer,et al.  Effect of EFO parameters on Cu FAB hardness and work hardening in thermosonic wire bonding , 2009 .

[69]  K. M. Chen,et al.  An investigation into the effects of probing and wire bonding stress on the reliability of BOAC , 2006, Microelectron. Reliab..

[70]  Z. W. Zhong,et al.  Overview of Board-Level Solder Joint Reliability Modeling for Single Die and Stacked Die CSPs , 2009, Proceedings of the IEEE.

[71]  Zhaowei Zhong,et al.  Wire-bonding process development for low-k materials , 2005 .

[72]  Masayasu Ishiko,et al.  Design concept for wire-bonding reliability improvement by optimizing position in power devices , 2006, Microelectron. J..

[73]  Michael Mayer,et al.  Effect of electronic flame off parameters on copper bonding wire: Free-air ball deformability, heat affected zone length, heat affected zone breaking force , 2009 .

[74]  C.P. Wong,et al.  Void Formation Study of Flip Chip in Package Using No-Flow Underfill , 2008, IEEE Transactions on Electronics Packaging Manufacturing.

[75]  Chin C. Hsia The quest of porous ELK materials for high performance logic technologies , 2006 .

[76]  Zhongqin Lin,et al.  Theoretical and numerical analysis of the effect of constant velocity on thermosonic bond strength , 2008, Microelectron. Reliab..

[77]  Zhaowei Zhong,et al.  Recent advances in wire bonding, flip chip and lead-free solder for advanced microelectronics packaging , 2007 .

[78]  Yi-Shao Lai,et al.  Transient simulation of wire pull test on Cu/low-K wafers , 2006, IEEE Transactions on Advanced Packaging.

[79]  Kiyoshi Takagi The Electronic Packaging Technology and Related Surface Finishing , 1995 .

[80]  Y. Zhou,et al.  Growth behavior of Cu/Al intermetallic compounds and cracks in copper ball bonds during isothermal aging , 2008, Microelectron. Reliab..

[81]  Yutian Ding Effects of Annealing and Drawing on Properties of Single Crystal Copper Bonding Wire , 2009 .