마이크로 정렬 시스템의 설계

This paper presents the micro positioning/tilting system with flexure. The basic principle and the operation mechanism were introduced. The micro positioning system consists of a moving platform, three piezoelectric actuators, damper and flexure hinges. The flexure hinges which are beam hinge, spherical notch joint, wide range hinge are designed and fabricated. The FEM simulation was used to design and optimize the flexure hinges mechanism. Form the result of FEM simulation we fabricated the micro position system by CNC machine and WEDM with the material of SUS 304. To evaluate the performance of the fabricated micro positioning system, the output displacement of the moving plate in vertical direction was measured and tested.