High-performance optical waveguide devices using 300mm Si photonics platform

The Si photonics platform for 300mm SOI wafers has been built up for optical multi-applications. The performance of main optical waveguide devices has been demonstrated. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform. The propagation loss is less than 0.5dB/cm at 1.55µm wavelength for 220nm-thick single-mode waveguides with TE-polarization. MMI coupler, AWG and WDM filter showed superior performance for their applications. The 50×50mm2 large Si interposers using photonics electronics convergence technology have been demonstrated. These results indicate that our Si photonics platform is very useful for optical multi-applications. Display Omitted The Si photonics platform for 300mm SOI wafers has been built up.The propagation loss is less than 0.5dB/cm at 1.55µm wavelength for waveguides.The 50×50mm2 large Si interposers have been demonstrated.This platform is useful for performance enhancement on the optical integrated circuit

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