Simple, fast, and cost-effective fabrication of wafer-scale nanohole arrays on silicon for antireflection

A simple, fast, and cost-effective method was developed in this paper for the high-throughput fabrication of nanohole arrays on silicon (Si), which is utilized for antireflection. Wafer-scale polystyrene (PS) monolayer colloidal crystal was developed as templates by spin-coating method. Metallic shadow mask was prepared by lifting off the oxygen etched PS beads from the deposited chromium film. Nanohole arrays were fabricated by Si dry etching. A series of nanohole arrays were fabricated with the similar diameter but with different depth. It is found that the maximum depth of the Si-hole was determined by the diameter of the Cr-mask. The antireflection ability of these Si-hole arrays was investigated. The results show that the reflection decreases with the depth of the Si-hole. The deepest Si-hole arrays show the best antireflection ability (reflection 600 nm), which was about 28 percent of the nonpatterned silicon wafer's reflection. The proposed method has the potential for high-throughput fabrication of patterned Si wafer, and the low reflectivity allows the application of these wafers in crystalline silicon solar cells.

[1]  Zhaoning Yu,et al.  Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff , 2003 .

[2]  Sarah Kim,et al.  Nanomachining by colloidal lithography. , 2006, Small.

[3]  Peng Jiang,et al.  Templated fabrication of large area subwavelength antireflection gratings on silicon , 2007 .

[4]  Yi Cui,et al.  Wafer-scale silicon nanopillars and nanocones by Langmuir-Blodgett assembly and etching , 2008 .

[5]  New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching , 2009, Nanoscale research letters.

[6]  Peng Jiang,et al.  Large-scale assembly of periodic nanostructures with metastable square lattices , 2009 .

[7]  Amit Lal,et al.  High-efficiency ordered silicon nano-conical-frustum array solar cells by self-powered parallel electron lithography. , 2010, Nano letters.

[8]  A. Yethiraj,et al.  Dynamics of Crystal Structure Formation in Spin-Coated Colloidal Films , 2010 .

[9]  Hong Liu,et al.  ZnO Pyramidal Arrays: Novel Functionality in Antireflection , 2010 .

[10]  Xin Wang,et al.  High-performance silicon nanohole solar cells. , 2010, Journal of the American Chemical Society.

[11]  Emmanuel Drouard,et al.  Absorbing photonic crystals for silicon thin-film solar cells: Design, fabrication and experimental investigation , 2011 .

[12]  R. L. Carroll,et al.  Fabrication of 3D metal dot arrays by geometrically structured dynamic shadowing lithography. , 2011, Langmuir : the ACS journal of surfaces and colloids.

[13]  C. Qian,et al.  Highly-ordered, 3D petal-like array for surface-enhanced Raman scattering. , 2011, Small.

[14]  Yi Cui,et al.  Nanowire Solar Cells , 2011 .

[15]  Anuj R. Madaria,et al.  Toward optimized light utilization in nanowire arrays using scalable nanosphere lithography and selected area growth. , 2012, Nano letters.

[16]  Sharka M. Prokes,et al.  Plasmonic properties of vertically aligned nanowire arrays , 2012 .

[17]  Shaoli Zhu,et al.  Topical review: design, fabrication, and applications of hybrid nanostructured array , 2012 .

[18]  Emmanuel Drouard,et al.  Design, fabrication and optical characterization of photonic crystal assisted thin film monocrystalline-silicon solar cells. , 2012, Optics express.

[19]  N. Yamada,et al.  Light Trapping Potential of Hexagonal Array Silicon Nanohole Structure for Solar Cell Application , 2012 .

[20]  Tadachika Nakayama,et al.  Characterization of light absorption in thin-film silicon with periodic nanohole arrays. , 2013, Optics express.

[21]  Xuezhong Wu,et al.  Diversification of nanostructure morphology by modifying angle-resolved heterogeneous shadow mask. , 2013, Journal of Nanoscience and Nanotechnology.

[22]  Xuezhong Wu,et al.  Controllable fabrication of 2D colloidal-crystal films with polystyrene nanospheres of various diameters by spin-coating , 2013 .

[23]  Kangho Kim,et al.  Influences of InGaP conical frustum nanostructures on the characteristics of GaAs solar cells , 2013 .

[24]  Emmanuel Drouard,et al.  Micrometer-Thin Crystalline-Silicon Solar Cells Integrating Numerically Optimized 2-D Photonic Crystals , 2014, IEEE Journal of Photovoltaics.