Development of an air flow sensor for heating, ventilating, and air conditioning systems based on printed circuit board technology

Abstract This work presents a novel air flow sensor for measuring flow velocities in heating, ventilating, and air conditioning systems. The transducer relies on printed circuit board technology allowing the fabrication of robust, design flexible, and cost-effective devices. Due to the interaction with the streaming fluid, the transducer generates an electrically measurable signal for determination of the total flow of the fluid. The measurement principle is based on a modified calorimetric principle where the heater is excited through a DC current and the sensing resistors are excited through a sine. Guided by extensive numerical simulations, a series of electrically transducer designs were investigated, optimized, and fabricated. Afterwards, these samples were characterized and compared to simulation results.

[1]  M. Gad-el-Hak,et al.  MEMS-based pressure and shear stress sensors for turbulent flows , 1999 .

[2]  R. Zhu,et al.  A Low-Cost Flexible Hot-Film Sensor System for Flow Sensing and its Application to Aircraft , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[3]  José Quero,et al.  Single axis accelerometer fabricated using printed circuit board techniques and laser ablation , 2013 .

[4]  Stoyan Nihtianov,et al.  Capacitive sensor interface with improved dynamic range and stability , 2014, 2014 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings.

[5]  Thilo Sauter,et al.  Thermal flow sensors based on printed circuit board technology , 2014, Fifteenth International Symposium on Quality Electronic Design.

[6]  Thilo Sauter,et al.  Characterization and optimization of a thermal flow sensor on circuit board level , 2014, Proceedings of the 2014 IEEE Emerging Technology and Factory Automation (ETFA).

[7]  Beelee Chua,et al.  Miniaturized corona flow sensor operating in drift mobility increment mode for low flow velocity measurement , 2015 .

[8]  Gerald Urban,et al.  A dynamic thermal flow sensor for simultaneous measurement of thermal conductivity and flow velocity of gases , 2014 .

[9]  Sheng Liu,et al.  A micro channel integrated gas flow sensor for high sensitivity , 2008, 2008 11th Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems.

[10]  Gerald Urban,et al.  Simultaneous flow and thermal conductivity measurement of gases utilizing a calorimetric flow sensor , 2013 .

[11]  Daniel Dias,et al.  Pressure sensing platform for health monitoring , 2014, 2014 IEEE International Symposium on Medical Measurements and Applications (MeMeA).

[12]  Kofi A. A. Makinwa,et al.  A wind sensor with an integrated low-offset instrumentation amplifier , 2001, ICECS 2001. 8th IEEE International Conference on Electronics, Circuits and Systems (Cat. No.01EX483).

[13]  Zygmunt Biernacki.  A system of wave thermoanemometer with a thermoresistive sensor , 1998 .

[14]  Gerald Urban,et al.  Development of miniaturized semiconductor flow sensors , 2003 .

[15]  A. Petropoulos,et al.  Flexible PCB-MEMS Flow Sensor , 2012 .

[16]  X. Zhang,et al.  High Sensitivity Micro-Thermal Conductivity Detector for Gas Chromatography , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[17]  F. Kohl,et al.  A Novel calorimetric flow sensor implementation based on thermal sigma-delta modulation , 2009, 2009 IEEE Sensors.

[18]  Tim Williams,et al.  The Circuit Designer's Companion , 1991 .

[19]  N. Nguyen,et al.  Thermal flow sensor for ultra-low velocities based on printed circuit board technology , 2001 .

[20]  Luis Pérez-Lombard,et al.  A review on buildings energy consumption information , 2008 .

[21]  Dejan Milic,et al.  Thermal Energy Harvesting Wireless Sensor Node in Aluminum Core PCB Technology , 2015, IEEE Sensors Journal.

[22]  Igor Paprotny,et al.  MEMS capacitive flow sensor for natural gas pipelines , 2015 .

[23]  Thilo Sauter,et al.  Concept of a thermal flow sensor integration on circuit board level , 2013, 2013 IEEE 18th Conference on Emerging Technologies & Factory Automation (ETFA).

[24]  Ellis Meng,et al.  Micromachined Thermal Flow Sensors - A Review , 2012, Micromachines.

[25]  R. Y. Que,et al.  A flexible integrated micromachined hot-film sensor array for measuring surface flow vector , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[26]  Nam-Trung Nguyen,et al.  Micromachined flow sensors—a review , 1997, Flow Measurement and Instrumentation.

[27]  Johan H. Huijsing,et al.  Design of thermal sigma-delta modulators for smart thermal sensors , 1995, Proceedings of ISCAS'95 - International Symposium on Circuits and Systems.

[28]  Terence O'Donnell,et al.  Planar fluxgate current sensor integrated in printed circuit board , 2006 .

[29]  Chien-Hsiung Tsai,et al.  Microfluidic flow meter and viscometer utilizing flow-induced vibration on an optic fiber cantilever , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.