A single-crystalline diamond X-ray detector based on direct sp3-to-sp2 conversed graphene electrodes

Abstract Diamond is an ultrawide bandgap semiconductor with excellent electronic and photonic properties, which has great potential applications in microelectronic and optoelectronic devices. As an allotrope of diamond, graphene also has many fantastic properties like diamond, which caught much attention in combing them together. In this work, a direct sp3-to-sp2 conversion method was proposed to fabricate graphene layers on single crystal diamond by thermal treatment with Ni film catalyst. By optimizing the conversing conditions, a thin graphene layer with low sheet resistance was obtained on diamond. Based on this, an all-carbon sandwich structural graphene-diamond-graphene (GDG) detector was fabricated, which shows low dark current of 0.45 nA at 0.5 V μm−1 applied electric field. The maximum sensitivity of this detector is obtained when the incident X-ray is 12 keV, with the value of 2.88 × 10−8 C Gy−1. Moreover, the rise time and delay time of the GDG detector is about 1.2 and 22.8 ns, respectively, which are very close to that of diamond detector with Ti/Au electrode. The realization of the direct in-situ sp3-to-sp2 conversion on diamond shows a promising approach for fabricating diamond-based all-carbon electronic devices.

[1]  M. Čaplovičová,et al.  Catalytic graphitization of single-crystal diamond , 2021, Carbon.

[2]  L. Servoli,et al.  Diamond Detectors for Radiotherapy X-Ray Small Beam Dosimetry , 2021, Frontiers in Physics.

[3]  Y. Hao,et al.  H-diamond MOS interface properties and FET characteristics with high-temperature ALD-grown HfO2 dielectric , 2021 .

[4]  G. Longobardi,et al.  Diamond power devices: state of the art, modelling, figures of merit and future perspective , 2019, Journal of Physics D: Applied Physics.

[5]  N. Lu,et al.  Stretchability of PMMA-supported CVD graphene and of its electrical contacts , 2019, 2D Materials.

[6]  M. Pomorski,et al.  Enhanced radiation hardness and signal recovery in thin diamond detectors , 2019, AIP Advances.

[7]  Li Fu,et al.  Highly stable and regenerative graphene-diamond hybrid electrochemical biosensor for fouling target dopamine detection. , 2018, Biosensors & bioelectronics.

[8]  A. Yu,et al.  Hall effect biosensors with ultraclean graphene film for improved sensitivity of label-free DNA detection. , 2018, Biosensors & bioelectronics.

[9]  M. Islam,et al.  Ultrawide‐Bandgap Semiconductors: Research Opportunities and Challenges , 2017 .

[10]  Jung‐Hun Seo,et al.  Recent advances in free-standing single crystalline wide band-gap semiconductors and their applications: GaN, SiC, ZnO, β-Ga2O3, and diamond , 2017 .

[11]  Liwei Lin,et al.  A Solar-Blind UV Detector Based on Graphene-Microcrystalline Diamond Heterojunctions. , 2017, Small.

[12]  S. Yamasaki,et al.  Fabrication of graphene on atomically flat diamond (111) surfaces using nickel as a catalyst , 2017 .

[13]  D. Takeuchi,et al.  Direct determination of the barrier height of Au ohmic-contact on a hydrogen-terminated diamond (001) surface , 2017 .

[14]  Jing Xu,et al.  Graphene grown out of diamond , 2016 .

[15]  Sanket A. Deshmukh,et al.  Metal-induced rapid transformation of diamond into single and multilayer graphene on wafer scale , 2016, Nature Communications.

[16]  K. Ueda,et al.  Direct formation of graphene layers on diamond by high-temperature annealing with a Cu catalyst , 2016 .

[17]  Hongyan Sun,et al.  A study of the growth-time effect on graphene layer number based on a Cu-Ni bilayer catalyst system , 2016 .

[18]  S. Shikata,et al.  Radiation hardness of a single crystal CVD diamond detector for MeV energy protons , 2015 .

[19]  A. Ouerghi,et al.  High Electron Mobility in Epitaxial Graphene on 4H-SiC(0001) via post-growth annealing under hydrogen , 2014, Scientific Reports.

[20]  Juanxia Wu,et al.  Raman spectroscopy of graphene , 2014 .

[21]  Liwei Lin,et al.  Carbon SP2-SP3 technology: Graphene-on-diamond thin film UV detector , 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).

[22]  D. Tománek,et al.  Theoretical investigation of the electronic structure and quantum transport in the graphene–C(111) diamond surface system , 2013, Journal of physics. Condensed matter : an Institute of Physics journal.

[23]  D. Takeuchi,et al.  Formation of Graphene-on-Diamond Structure by Graphitization of Atomically Flat Diamond (111) Surface , 2013 .

[24]  Wei Hu,et al.  Diamond as an inert substrate of graphene. , 2013, The Journal of chemical physics.

[25]  M. Choe,et al.  The application of graphene as electrodes in electrical and optical devices , 2012, Nanotechnology.

[26]  Patrick R. Brown,et al.  Graphene as transparent conducting electrodes in organic photovoltaics: studies in graphene morphology, hole transporting layers, and counter electrodes. , 2012, Nano letters.

[27]  T. Venkatesan,et al.  The effect of layer number and substrate on the stability of graphene under MeV proton beam irradiation , 2011, 1101.5744.

[28]  L Reinisch,et al.  CVD diamond X-ray detectors for radiotherapy dosimetry , 2009, 2009 IEEE Sensors.

[29]  C. N. Lau,et al.  Superior thermal conductivity of single-layer graphene. , 2008, Nano letters.

[30]  S. Xiao,et al.  Intrinsic and extrinsic performance limits of graphene devices on SiO2. , 2007, Nature nanotechnology.

[31]  W. Cunningham,et al.  Single crystal CVD diamond as an X-ray beam monitor , 2007 .

[32]  M. Liao,et al.  Thermally stable solar-blind diamond UV photodetector , 2006 .

[33]  M. Marinelli,et al.  Radiological X-ray dosimetry with single crystal CVD diamond detectors , 2006 .

[34]  D. Twitchen,et al.  High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond , 2002, Science.

[35]  D. Tromson,et al.  CVD diamond for nuclear detection applications , 2002 .

[36]  D. Tromson,et al.  CVD diamond for radiation detection devices , 2001 .

[37]  A. Oh,et al.  Neutron irradiation studies with detector grade CVD diamond , 2000 .

[38]  D. Kania,et al.  Diamond radiation detectors , 1993 .

[39]  P. Siffert,et al.  Preparation and Characteristics of Natural Diamond Nuclear Radiation Detectors , 1975, IEEE Transactions on Nuclear Science.

[40]  D. Wooldridge,et al.  Conductivity Pulses Induced in Diamond by Alpha-Particles , 1947 .