Topology Optimized Design and Microfabrication of Compliant Microgripper

This article designs a new structure of microgripper with the object function of the maximal output displacement using SIMP(Solid Isotropic Microstructures Penalization) artificial material density method based on the theory of topology optimization technology of continuum structures. The topological structure is unfolding-when-driven that consumes less energy because it grips object by the return force,and the microgripper is versatile because of its bigger gripping range. A general process is given to describe the design details. And the result of topology optimization is remodeled. Electro-thermal actuation is used to drive the microgripper. The results of finite element analysis testify the design of topology optimization. Based on the result of design,the microgripper is fabricated by UV-LIGA technology.