Flexible Al/PZT/Al composite for piezoelectric applications

Flexible lead zirconate titanate (PZT) thin films have been developed by a chemical process (CSD), using aluminium foil as substrate, in view of optimizing their piezoelectric properties. Due to the mechanical properties of the aluminium foil (16 μm thick, 69 GPa as for Young’s modulus), original forms have been obtained because such a thin film is easily cuttable, and the conformable. Despite the mechanical mismatch between brittle PZT and its flexible substrate, hysteresis loop obtained during the P-E measurements has demonstrated high remnant polarization (26 μC/cm2 that augurs exploitable macroscopic piezoelectric behavior. Al/PZT/Al cantilever beam has been realized and very high deflections (in the centimeter range) have been observed when subjected to low applied voltages (up to 10 V). Besides, the sensitivity of a 0.8 cm long Al/PZT/Al cantilever to acoustic waves has been measured, yielding a resonance frequency of 220 Hz and a quality factor of 47, thanks to great flexibility of the thin aluminium substrate. At last, waterproof multilayer composite has been realized by encapsulation of the beam using polyethylene terephthalate (PET). The so formed alga has been used to sense the low frequency (~1 Hz) of swell generated in an experimental basin.

[1]  Hidetoshi Kotera,et al.  High-efficiency piezoelectric energy harvesters of c-axis-oriented epitaxial PZT films transferred onto stainless steel cantilevers , 2010 .

[2]  Hideaki Adachi,et al.  Vibration energy harvesting using highly (001)-oriented Pb(Zr,Ti)O3 thin film , 2010 .

[3]  Seok-Jin Yoon,et al.  Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process , 2013 .

[4]  Nae-Eung Lee,et al.  $\hbox{PbZr}_{x}\hbox{Ti}_{1 - x}\hbox{O}_{3}$ Ferroelectric Thin-Film Capacitors for Flexible Nonvolatile Memory Applications , 2010, IEEE Electron Device Letters.

[5]  J.G. Smits,et al.  The constituent equations of piezoelectric heterogeneous bimorphs , 1991, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[6]  I. Kanno,et al.  PIEZOELECTRIC PROPERTIES OF C-AXIS ORIENTED PB(ZR,TI)O3 THIN FILMS , 1997 .

[7]  Johannes G.E. Gardeniers,et al.  Direct measurement of piezoelectric properties of Sol-Gel PZT films , 1998 .

[8]  Raynald Seveno,et al.  Preparation of multi-coating PZT Thick Films by Sol-Gel Method onto Stainless Steel Substrates , 2000 .

[9]  J. Maria,et al.  Ferroelectric response from lead zirconate titanate thin films prepared directly on low-resistivity copper substrates , 2005 .

[10]  P. Renaud,et al.  Piezoelectric Cantilever Beams Actuated By PZT Sol-gel Thin Film , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[11]  Seok-Jin Yoon,et al.  Fabrication of flexible device based on PAN-PZT thin films by laser lift-off process , 2012 .

[12]  B. Guiffard,et al.  Flexible PET/Al/PZT/Al/PET multi-layered composite for low frequency energy harvesting , 2017 .

[13]  J. F. Shepard,et al.  The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films , 1998 .

[14]  F. Kneubühl,et al.  Oscillations and Waves , 1985 .

[15]  B. G. Yacobi,et al.  Dielectric properties of lead zirconate titanate thin films deposited on metal foils , 2000 .

[16]  C. Nguyen,et al.  Piezoelectric–mechanical–acoustic couplings from a PZT-actuated vibrating beam and its sound radiation , 2004 .

[17]  Raynald Seveno,et al.  Ultra light tunable capacitor based on PZT thin film deposited onto aluminium foil , 2013, Journal of Sol-Gel Science and Technology.