A User's Guide to Vacuum Technology

Vacuum Technology. Gas Properties. Gas Flow. Gas Release from Solids. Pressure Gauges. Flow Meters. Pumping Speed. Residual Gas Analyzers. Interpretation of RGA Data. Mechanical Pumps. Turbomolecular Pumps. Diffusion Pumps. Pump Fluids. Getter and Ion Pumps. Cryogenic Pumps. Materials in Vacuum. Joints, Seals, and Valves. Lubrication. Rough Vacuum Pumping. High Vacuum Systems. Ultraclean Vacuum Systems. High Flow Systems. Multichamber Systems. Leak Detection. Symbols. Appendix A. Units and Constants. Appendix B. Gas Properties. Appendix C. Material Properties. Appendix D. Isotopic Abundances. Appendix E. Cracking Patterns. Appendix F. Pump Fluid Properties. Index.