Design and Fabrication of Air-Based 1-3 Piezoelectric Composite Transducer for Air-Coupled Ultrasonic Applications

The air-based 1-3 piezoelectric composite transducers are designed and fabricated in order to solve the acoustic impedance matching problem. Firstly, a finite element model using honeycomb structure as the piezoelectric composite matrix is built to reduce the acoustic impedance of the sensitive element. Three important factors, volume fraction of piezoelectric materials , the thickness , and the size of the square cross section of piezoelectric column, are examined and verified in simulation. Then, according to the result of simulation, the piezoelectric composites and the air-coupled transducers are fabricated. The honeycomb structures of resin are produced by the method of 3D printing technology, with the volume fraction of air being 30%. The impedance characteristics and the excitation/reception performance of the air-coupled transducers are measured and optimized. Meanwhile, a scanning experiment is carried out to demonstrate the crack detection process in monocrystalline silicon. mode of Lamb waves is excited and collected. The location and size of the defect will be determined by calculating the correlation coefficients of the received signals and reference signals. Finally, a 15 mm × 0.5 mm × 0.5 mm scratch is clearly distinguished.

[1]  R. Cepel,et al.  Spatial Correlation Coefficient Images for Ultrasonic Detection , 2007, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[2]  Zhechang Wang Probability of preventing from runner blades cracking with compressive stress induced by explosive shock waves treatment , 2008 .

[3]  G. Hayward,et al.  Assessing the influence of pillar aspect ratio on the behavior of 1-3 connectivity composite transducers , 1996, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[4]  J. Salazar,et al.  Lamb waves beam deviation due to small inclination of the test structure in air-coupled ultrasonic NDT. , 2006, Ultrasonics.

[5]  Joseph L. Rose,et al.  Ultrasonic Guided Wave Imaging of a Composite Plate with Air‐Coupled Transducers , 2007 .

[6]  Bin Wu,et al.  Delamination damage detection of laminated composite beams using air-coupled ultrasonic transducers , 2013 .

[7]  Kyung-Young Jhang,et al.  Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave , 2013 .

[8]  D Chinn,et al.  High-spatial-resolution sub-surface imaging using a laser-based acoustic microscopy technique , 2011, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

[9]  Jeong-Ki Lee,et al.  Comparison of slowness curves of Lamb wave with elastic moduli and crystal structure in silicon wafers , 2013, 2013 IEEE International Ultrasonics Symposium (IUS).

[10]  Gerhard Busse,et al.  MATERIAL CHARACTERIZATION AND NDE USING FOCUSED SLANTED TRANSMISSION MODE OF AIR-COUPLED ULTRASOUND , 2004 .

[11]  L. E. Cross,et al.  Connectivity and piezoelectric-pyroelectric composites , 1978 .

[12]  Zhenggan Zhou,et al.  Progress of Air-coupled Ultrasonic Non-destructive Testing Technology , 2008 .

[13]  W. Marsden I and J , 2012 .

[14]  B. Auld,et al.  Modeling 1-3 composite piezoelectrics: thickness-mode oscillations , 1991, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[15]  Peter Cawley,et al.  Single Sided Inspection of Composite Materials Using Air Coupled Ultrasound , 1998 .

[16]  Jinying Zhu,et al.  Using air-coupled sensors to determine the depth of a surface-breaking crack in concrete. , 2010, The Journal of the Acoustical Society of America.

[17]  Krishnan Balasubramaniam,et al.  Crack Detection in Full Size Cz-Silicon Wafers Using Lamb Wave Air Coupled Ultrasonic Testing (LAC-UT) , 2012 .

[18]  Lin Ye,et al.  Guided Lamb waves for identification of damage in composite structures: A review , 2006 .

[19]  Joseph L. Rose,et al.  A Baseline and Vision of Ultrasonic Guided Wave Inspection Potential , 2002 .

[20]  Aaas News,et al.  Book Reviews , 1893, Buffalo Medical and Surgical Journal.

[21]  D. P. Hess,et al.  Crack Detection and Analyses Using Resonance Ultrasonic Vibrations in Full-Size Crystalline Silicon Wafers , 2005 .

[22]  Wei Dong Progress of Air-coupled Ultrasonic Non-destructive Testing Technology , 2007 .

[23]  B. A. Auld,et al.  Resonant modes of vibration in piezoelectric PZT-polymer composites with two dimensional periodicity , 1984 .