Fundamentals of two-photon fabrication

Abstract The phenomenon of multiphoton absorption (MPA) was predicted in 1930 and was first realized experimentally in 1961. Since that time, the development of reliable ultrafast lasers has allowed MPA to undergo a metamorphosis from a spectroscopic tool into a powerful enabling technology for high-resolution, 3D imaging, and fabrication. This chapter provides an introduction to the optical physics of MPA as well as to some of the chemical principles behind multiphoton fabrication in polymers and other materials.

[1]  Patrice L. Baldeck,et al.  Two-photon induced fabrication of gold microstructures in polystyrene sulfonate thin films using a ruthenium(II) dye as photoinitiator , 2008 .

[2]  Bahaa E. A. Saleh,et al.  Replication of Two-Photon-Polymerized Structures with Extremely High Aspect Ratios and Large Overhangs , 2004 .

[3]  R. Sillitto The Quantum Theory of Light , 1974 .

[4]  Klaus Cicha,et al.  Young’s modulus measurement of two-photon polymerized micro-cantilevers by using nanoindentation equipment , 2012 .

[5]  Shoji Maruo,et al.  Femtosecond laser direct writing of metallic microstructures by photoreduction of silver nitrate in a polymer matrix. , 2008, Optics express.

[6]  Lei Guo,et al.  Multiphoton Excited Fluorescent Materials for Frequency Upconversion Emission and Fluorescent Probes , 2014, Advanced materials.

[7]  J. Shear,et al.  3D printing of microscopic bacterial communities , 2013, Proceedings of the National Academy of Sciences.

[8]  P. Prasad,et al.  Two‐Photon Lithography of Sub‐Wavelength Metallic Structures in a Polymer Matrix , 2010, Advanced materials.

[9]  Wataru Sakai,et al.  Two-photon laser fabrication of three-dimensional silver microstructures with submicron scale linewidth , 2011 .

[10]  S. Kawata,et al.  Two-photon-induced reduction of metal ions for fabricating three-dimensional electrically conductive metallic microstructure , 2006 .

[11]  Satoshi Kawata,et al.  Elastic force analysis of functional polymer submicron oscillators , 2001 .

[12]  Ute Drechsler,et al.  SU-8 for real three-dimensional subdiffraction-limit two-photon microfabrication , 2004 .

[13]  Satoshi Kawata,et al.  Shape precompensation in two-photon laser nanowriting of photonic lattices , 2004 .

[14]  P. Ormos,et al.  Holographic multi-focus 3D two-photon polymerization with real-time calculated holograms. , 2014, Optics express.

[15]  B R Masters,et al.  Two-photon excitation fluorescence microscopy. , 2000, Annual review of biomedical engineering.

[16]  P. N. Butcher,et al.  The Elements of Nonlinear Optics , 1990 .

[17]  Jason B Shear,et al.  Guiding neuronal development with in situ microfabrication. , 2004, Proceedings of the National Academy of Sciences of the United States of America.

[18]  K. Belfield,et al.  Two‐Photon Fluorescent Probes for Bioimaging , 2012 .

[19]  Sankaran Thayumanavan,et al.  Optimizing Two-Photon Initiators and Exposure Conditions for Three-Dimensional Lithographic Microfabrication. , 2001 .

[20]  B. Chichkov,et al.  Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator , 2011, Biomedical optics express.

[21]  Maria Farsari,et al.  Redox multiphoton polymerization for 3D nanofabrication. , 2013, Nano letters.

[22]  M. Madou Fundamentals of microfabrication : the science of miniaturization , 2002 .

[23]  C. Garrett,et al.  Two-photon excitation in CaF2:Eu2+ , 2003 .

[24]  M. Teich,et al.  Polymer microcantilevers fabricated via multiphoton absorption polymerization , 2005 .

[25]  Pál Ormos,et al.  Optical microassembly platform for constructing reconfigurable microenvironments for biomedical studies. , 2009, Optics express.

[26]  T. Baldacchini,et al.  Direct Laser Patterning of Conductive Wires on Three-Dimensional Polymeric Microstructures , 2006 .

[27]  R. Osellame,et al.  Two-Photon Laser Polymerization: From Fundamentals to Biomedical Application in Tissue Engineering and Regenerative Medicine , 2012, Journal of applied biomaterials & functional materials.

[28]  W. Webb,et al.  Two-Photon Fluorescence Excitation Cross Sections of Biomolecular Probes from 690 to 960 nm. , 1998, Applied optics.

[29]  Satoru Shoji,et al.  Giant elasticity of photopolymer nanowires , 2007 .

[30]  John T. Fourkas,et al.  Photochemical Synthesis and Multiphoton Luminescence of Monodisperse Silver Nanocrystals , 2006 .

[31]  Tianyue Yu,et al.  An efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication. , 2002, Science.

[32]  J. Perry,et al.  Two-Photon Absorbing Materials and Two-Photon-Induced Chemistry , 2008 .

[33]  M. Ericson,et al.  Multiphoton microscopy. a powerful tool in skin research and topical drug delivery science , 2012 .

[34]  C. G. Roffey Photopolymerization of surface coatings , 1982 .

[35]  Tommaso Baldacchini,et al.  Multiphoton laser direct writing of two-dimensional silver structures. , 2005, Optics express.

[36]  Jane M. Shaw,et al.  Micromachining applications of a high resolution ultrathick photoresist , 1995 .

[37]  A. Penzkofer,et al.  Absorption behaviour of methanolic rhodamine 6G solutions at high concentration , 1986 .

[38]  W. Denk,et al.  Two-photon laser scanning fluorescence microscopy. , 1990, Science.

[39]  Daniel Day,et al.  Multi-level optical data storage in a photobleaching polymer using two-photon excitation under continuous wave illumination , 2002 .

[40]  B. Chichkov,et al.  Multi-focus two-photon polymerization technique based on individually controlled phase modulation. , 2010, Optics express.

[41]  B. Shapiro,et al.  Flow Control of Small Objects on Chip: Manipulating Live Cells, Quantum Dots, and Nanowires , 2012, IEEE Control Systems.

[42]  Holger Becker,et al.  Polymer microfabrication technologies for microfluidic systems , 2008, Analytical and bioanalytical chemistry.

[43]  C. Raman A new radiation , 1953 .

[44]  R. Gattass,et al.  Achieving λ/20 Resolution by One-Color Initiation and Deactivation of Polymerization , 2009, Science.

[45]  Maria Goeppert-Mayer Über Elementarakte mit zwei Quantensprüngen , 1931 .

[46]  John T Fourkas,et al.  Efficient and robust multiphoton data storage in molecular glasses and highly crosslinked polymers , 2002, Nature materials.

[47]  S. Kawata,et al.  Improvement in the reduction of silver ions in aqueous solution using two-photon sensitive dye , 2006 .

[48]  Raymond C Rumpf,et al.  Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8. , 2011, Optics express.

[49]  Cryogenic two-photon laser photolithography with SU-8 , 2006 .

[50]  Kevin D Belfield,et al.  High-speed multiphoton absorption polymerization: fabrication of microfluidic channels with arbitrary cross-sections and high aspect ratios. , 2010, Lab on a chip.

[51]  A. Piskarskas,et al.  Ultrafast laser nanostructuring of photopolymers: a decade of advances , 2013 .

[52]  K. Lee,et al.  Two‐photon stereolithography for realizing ultraprecise three‐dimensional nano/microdevices , 2009 .

[53]  Linjie Li,et al.  Soft-lithographic replication of 3D microstructures with closed loops. , 2006, Proceedings of the National Academy of Sciences of the United States of America.

[54]  W. H. Teh,et al.  Effect of low numerical-aperture femtosecond two-photon absorption on (SU-8) resist for ultrahigh-aspect-ratio microstereolithography , 2005 .

[55]  P. Ormos,et al.  Parallel photopolymerisation with complex light patterns generated by diffractive optical elements. , 2007, Optics express.

[56]  Wolfgang Losert,et al.  Cellular Contact Guidance through Dynamic Sensing of Nanotopography , 2013, ACS nano.

[57]  Paul J Campagnola,et al.  Enzymatic activity of alkaline phosphatase inside protein and polymer structures fabricated via multiphoton excitation. , 2004, Biomacromolecules.

[58]  Aleksandr Ovsianikov,et al.  Initiation efficiency and cytotoxicity of novel water-soluble two-photon photoinitiators for direct 3D microfabrication of hydrogels , 2013 .

[59]  Satoshi Kawata,et al.  Scaling laws of voxels in two-photon photopolymerization nanofabrication , 2003 .

[60]  Dong-Yol Yang,et al.  Advances in 3D nano/microfabrication using two-photon initiated polymerization , 2008 .

[61]  Satoshi Kawata,et al.  Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization. , 2006, Optics express.

[62]  Michael P. Stocker,et al.  Multiphoton photoresists giving nanoscale resolution that is inversely dependent on exposure time. , 2011, Nature chemistry.

[63]  M. Teich,et al.  Fundamentals of Photonics , 1991 .

[64]  C. Garrett,et al.  Two-Photon Excitation in CaF 2 : Eu 2+ , 1961 .

[65]  Alexander K. Nguyen,et al.  Two-photon polymerization of 3-D zirconium oxide hybrid scaffolds for long-term stem cell growth. , 2014, Biointerphases.

[66]  John A Rogers,et al.  A photocurable poly(dimethylsiloxane) chemistry designed for soft lithographic molding and printing in the nanometer regime. , 2003, Journal of the American Chemical Society.

[67]  Niklas Pucher,et al.  A Straightforward Synthesis and Structure−Activity Relationship of Highly Efficient Initiators for Two-Photon Polymerization , 2013 .

[68]  N. Tsutsumi,et al.  Fabrication of the silver structure through two-photon excitation by femtosecond laser , 2014 .

[69]  P. Campagnola,et al.  Measurement of normal and anomalous diffusion of dyes within protein structures fabricated via multiphoton excited cross-linking. , 2004, Biomacromolecules.

[70]  Benjamin P Cumming,et al.  Adaptive optics enhanced direct laser writing of high refractive index gyroid photonic crystals in chalcogenide glass. , 2014, Optics express.

[71]  John T. Fourkas,et al.  Simultaneous microscale optical manipulation, fabrication and immobilisation in aqueous media , 2012 .

[72]  Satoshi Kawata,et al.  Laser nanofabrication in photoresists and azopolymers , 2014 .

[73]  Seth R. Marder,et al.  Laser and Electron‐Beam Induced Growth of Nanoparticles for 2D and 3D Metal Patterning , 2002 .

[74]  Wolfgang Losert,et al.  Binary and gray-scale patterning of chemical functionality on polymer films. , 2008, Journal of the American Chemical Society.

[75]  David N. Sharp,et al.  The Control of Shrinkage and Thermal Instability in SU‐8 Photoresists for Holographic Lithography , 2011 .

[76]  Satoshi Kawata,et al.  Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency , 2007 .

[77]  Christopher K. Ober,et al.  Three-Dimensional Microfabrication by Two-Photon Lithography , 2005 .

[78]  M. Wegener,et al.  Gold Helix Photonic Metamaterial as Broadband Circular Polarizer , 2009, Science.

[79]  J. Fischer,et al.  Three‐dimensional optical laser lithography beyond the diffraction limit , 2013 .

[80]  Douglas Magde,et al.  Fluorescence Quantum Yields and Their Relation to Lifetimes of Rhodamine 6G and Fluorescein in Nine Solvents: Improved Absolute Standards for Quantum Yields¶ , 2002, Photochemistry and photobiology.

[81]  S. Kuebler,et al.  Route to Three-Dimensional Metallized Microstructures Using Cross-Linkable Epoxide SU-8 , 2007 .

[82]  B J Schwartz,et al.  Single-shot two-photon exposure of commercial photoresist for the production of three-dimensional structures. , 1998, Optics letters.

[83]  Linjie Li,et al.  Selective functionalization of 3-D polymer microstructures. , 2006, Journal of the American Chemical Society.

[84]  Satoshi Kawata,et al.  Two-photon photopolymerization and 3D lithographic microfabrication , 2005 .

[85]  A. del Campo,et al.  A Polyurethane-Based Positive Photoresist. , 2014, Macromolecular rapid communications.

[86]  Theodore S. Drakakis,et al.  Construction of three-dimensional biomolecule structures employing femtosecond lasers , 2006 .

[87]  A. Ovsianikov,et al.  3D photografting with aromatic azides: A comparison between three-photon and two-photon case , 2013 .

[88]  William S. DeForest,et al.  Photoresist: Materials and Processes , 1975 .

[89]  B. M. Monroe,et al.  Photoinitiators for free-radical-initiated photoimaging systems , 1993 .

[90]  P. Prasad,et al.  High-density three-dimensional optical data storage in a stacked compact disk format with two-photon writing and single photon readout , 1999 .

[91]  Shoji Maruo,et al.  Recent progress in multiphoton microfabrication , 2008 .

[92]  S. Kawata,et al.  Three-dimensional microfabrication with two-photon-absorbed photopolymerization. , 1997, Optics letters.

[93]  M. Kaur,et al.  PHOTOPOLYMERIZATION: A REVIEW , 2002 .

[94]  Martin Wegener,et al.  Direct Laser Writing of Three‐ Dimensional Photonic Crystals with a Complete Photonic Bandgap in Chalcogenide Glasses , 2006 .

[95]  B. Chichkov,et al.  Multiphoton polymerization of hybrid materials , 2010 .

[96]  M. Terrones,et al.  Pure and doped boron nitride nanotubes , 2007 .

[97]  Stephen M. Kuebler,et al.  Fabrication and Characterization of Three‐Dimensional Silver‐Coated Polymeric Microstructures , 2006 .

[98]  Eric T Ritschdorff,et al.  Multi-focal multiphoton lithography. , 2012, Lab on a chip.

[99]  Satoshi Kawata,et al.  3D metallic nanostructure fabrication by surfactant-assisted multiphoton-induced reduction. , 2009, Small.