Future of IC microtransducers

Abstract IC microtransducers are sensors or actuators based on industrial CMOS or bipolar integrated circuit (IC) technology combined with additional bulk or surface micromachining, thin-film deposition or electroplating. IC microtransducers including on-chip bias and signal-conditioning circuitry are essential building blocks for integrated microelectromechanical systems (iMEMS). The state of IC microtransducers is illustrated by recent microsystem prototypes for magnetic angular measurement, magnetic field detection, thermoelectric infrared intrusion detection, thermoelectric conversion of electric power, thermal vacuum and flow measurement, building control, acoustic proximity sensing and ultraviolet flame detection. IC microtransducer development is supported by the design tools SOLIDIS and ICMAT. SOLIDIS is a simulation toolbox for coupled numerical modelling of electrical, magnetic, thermal and mechanical effects. ICMAT is a data base of material parameters obtained from measuring process-dependent electrical, magnetic, thermal and mechanical properties of CMOS layers using dedicated characterization structures.

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