On the interpretation of electrical measurements on the GaAs-MOS system

Abstract Detailed evidence is presented which shows that previously published analyses of various investigations regarding the electrical characteristics of the GaAs MOS system lead to incorrect conclusions. Primarily the results were interpreted in terms of models which were developed to fit the Si-SiO2 interface properties. However, detailed I–V and admittance measurements show that there are basic differences between the two systems, as the one with GaAs exhibits a charge injection phenomenon across the interface barrier, oxide conduction and a complicated (up to now insufficiently understood) interface behaviour. All these effects prevent the determination of interface state densities by conventional methods. The conclusion, that simply because of a high density of interface states neither accumulation nor inversion are possible, is not justified.

[1]  J. W. Gadzuk Resonance Tunneling Through Impurity States in Metal‐Insulator‐Metal Junctions , 1970 .

[2]  H. Hartnagel,et al.  Stable charge storage of m.a.o.s. diodes on GaAs by new anodic oxidation , 1977 .

[3]  J. Simmons,et al.  Effect of temperature and voltage sweep rate on C ƒ- V characteristics of MIS capacitors , 1974 .

[4]  W. Quast Small-signal admittance of the insulator-n type-gallium-arsenide interface region , 1972 .

[5]  E. Kohn,et al.  Enhancement-mode GaAs m.o.s.f.e.t. on semi-insulating substrate using a self-aligned gate technique , 1977 .

[6]  E. H. Nicollian,et al.  The si-sio, interface – electrical properties as determined by the metal-insulator-silicon conductance technique , 1967 .

[7]  J. Swartz,et al.  Electrical Characteristics of the Silicon Nitride‐Gallium Arsenide Interface , 1970 .

[8]  B. Yun,et al.  Measurements of charge propagation in Si3N4 films , 1974 .

[9]  G. Declerck,et al.  Inadequacy of the classical theory of the MOS transistor operating in weak inversion , 1973 .

[10]  F. H. Hielscher,et al.  Non-equilibrium C-V and I-V characteristics of metal-insulator-semiconductor capacitors , 1969 .

[11]  G. Warfield,et al.  Physical limitations on the frequency response of a semiconductor surface inversion layer , 1965 .

[12]  J E Pattison,et al.  International symposium on GaAs and related compounds , 1975 .

[13]  H. Hartnagel,et al.  First anodic-oxide GaAs m.o.s.f.e.t.s based on easy technological processes , 1976 .

[14]  C. N. Berglund Surface states at steam-grown silicon-silicon dioxide interfaces , 1966 .

[15]  R. Pierret,et al.  A linear-sweep MOS-C technique for determining minority carrier lifetimes , 1972 .

[16]  Hideki Hasegawa,et al.  New anodic native oxide of GaAs with improved dielectric and interface properties , 1975 .

[17]  P. Malmin Cole‐cole plotting of surface state admittance in MIS capacitors , 1971 .

[18]  Ingemar Lundström,et al.  Trap‐assisted charge injection in MNOS structures , 1973 .

[19]  H. Hasegawa,et al.  Anodic Oxidation of GaAs in Mixed Solutions of Glycol and Water , 1976 .

[20]  R. Walden A Method for the Determination of High‐Field Conduction Laws in Insulating Films in the Presence of Charge Trapping , 1972 .

[21]  R. Castagné,et al.  Description of the SiO2Si interface properties by means of very low frequency MOS capacitance measurements , 1971 .

[22]  D. Lile,et al.  Depletion‐mode GaAs MOS FET , 1976 .

[23]  J. Nakai,et al.  Surface Potential and Surface State Density in Anodized GaAs MOS Capacitors , 1976 .

[24]  H. Hasegawa,et al.  Anomalous frequency dispersion of m.o.s. capacitors formed on n-type GaAs by anodic oxidation , 1976 .

[25]  L. Terman An investigation of surface states at a silicon/silicon oxide interface employing metal-oxide-silicon diodes , 1962 .