REVIEW: MEMS and Its Applications for Flow Control

Emerging micromachining technology enables us to fabricate mechanical parts on the order of micron size. It provides us with micro-sensors and micro-actuators which facilitate the exploration of all areas of science. Furthermore, these miniature transducers can be integrated with microelectronics. With an integrated system, it then becomes possible to complete the loop of sensing, information processing, and actuation. This type of system enables us to perform real-time control of time varying events which are common in fluid dynamics. In this review paper, we will first briefly introduce Micro-Electro-Mechanical-Systems (MEMS) technology. Then, the applications of MEMS to flow control will be discussed.

[1]  B. Schwartz,et al.  Chemical Etching of Silicon IV . Etching Technology , 1959 .

[2]  A. B. Frazier,et al.  High aspect ratio electroplated microstructures using a photosensitive polyimide process , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[3]  Yu-Chong Tai,et al.  Lightly-doped polysilicon bridge as a flow meter , 1988 .

[4]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[5]  P. McNally,et al.  A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs , 1998 .

[6]  Chih-Ming Ho,et al.  Analog VLSI system for active drag reduction , 1996, Proceedings of Fifth International Conference on Microelectronics for Neural Networks.

[7]  Chih-Ming Ho,et al.  A surface-micromachined shear stress imager , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[8]  K. Wise,et al.  An implantable multielectrode array with on-chip signal processing , 1986 .

[9]  Chih-Ming Ho,et al.  Subharmonics and vortex merging in mixing layers , 1982, Journal of Fluid Mechanics.

[10]  R. Finne,et al.  A Water‐Amine‐Complexing Agent System for Etching Silicon , 1967 .

[11]  D. B. Lee.  Anisotropic Etching of Silicon , 1969 .

[12]  William C. Tang,et al.  Electrostatic-comb drive of lateral polysilicon resonators , 1990 .

[13]  R. Muller,et al.  Silicon-processed overhanging microgripper , 1992 .

[14]  William C. Tang,et al.  Laterally Driven Polysilicon Resonant Microstructures , 1989 .

[15]  Chang-Jin Kim,et al.  A bistable snapping microactuator , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[16]  K. Bean,et al.  Anisotropic etching of silicon , 1978, IEEE Transactions on Electron Devices.

[17]  Y. Tai,et al.  Improved micro thermal shear-stress sensor , 1996 .

[18]  W. Benecke,et al.  NH4OH-based etchants for silicon micromachining: Influence of additives and stability of passivation layers , 1990 .

[19]  Bertram Schwartz,et al.  Chemical Etching of Silicon II . The System , , , and , 1960 .

[20]  E. Bassous.  Fabrication of novel three-dimensional microstructures by the anisotropic etching of , 1978, IEEE Transactions on Electron Devices.

[21]  L. O'Connor.  MEMS : microelectromechanical systems , 1992 .

[22]  Mohamed Gad-el-Hak,et al.  Reynolds Number Effects in Wall-Bounded Turbulent Flows , 1994 .

[23]  Kenneth S. Breuer,et al.  Gaseous flow in small channels , 1993 .

[24]  J. Bryzek,et al.  Micromachines on the march , 1994, IEEE Spectrum.

[25]  Martin A. Schmidt,et al.  A microfabricated floating-element shear stress sensor using wafer-bonding technology , 1992 .

[26]  W. Benecke,et al.  NH4Oh-based etchants for silicon micromachining , 1990 .

[27]  B. Willis,et al.  Calibration Of Microfabricated Shear Stress Sensors , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[28]  K. D. Wise,et al.  An electrochemical P-N junction etch-stop for the formation of silicon microstructures , 1981, IEEE Electron Device Letters.

[29]  T. Duzer,et al.  (100) Silicon Etch‐Rate Dependence on Boron Concentration in Ethylenediamine‐Pyrocatechol‐Water Solutions , 1984 .

[30]  R. Howe,et al.  Polycrystalline Silicon Micromechanical Beams , 1983 .

[31]  James McMichael,et al.  Progress and prospects for active flow control using Microfabricated Electromechanical Systems (MEMS) , 1996 .

[32]  Chih-Ming Ho,et al.  Perturbed Free Shear Layers , 1984 .

[33]  Yu-Chong Tai,et al.  IC-processed electrostatic synchronous micromotors , 1989 .

[34]  Kendall Preston,et al.  Coherent optical computers , 1972 .

[35]  T. Christenson,et al.  Fabrication of assembled micromechanical components via deep X-ray lithography , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[36]  Yu-Chong Tai,et al.  Integrated movable micromechanical structures for sensors and actuators , 1988 .

[37]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[38]  A. Reisman,et al.  The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions , 1979 .