Numerical analysis of multiple field limiting ring systems

Abstract Multiple field limiting ring systems are well established as a means of protecting high voltage, deep diffused junctions from premature electrical breakdown. However, as the depths of these diffusions decrease, the number of rings required to achieve a given percentage of the plane breakdown, increases and efficient design becomes more difficult. In this work we describe an efficient algorithm, that makes practical the design of complete interacting ring systems containing many rings. Important aspects of ring design are first explored using our model to investigate a basic three ring structure. Then theoretical predictions and experimental results are compared for a nine ring design aimed at 1000 V breakdown with a 5 μm junction depth.