Novel microfluidic interconnectors for high temperature and pressure applications

Reliable microfluidic interconnectors are one of the basic building blocks of integrated fluidic and chemical reaction systems-on-chip. Though many ideas have been proposed and implemented in the literature for creating different kinds of macro-to-micro fluidic connections, development of integrated on-chip connectors for high temperature and pressure microfluidic applications has not been properly studied. Such connectors will be indispensable in true on-chip chemical processing applications for reactions which require more severe operating conditions than those possible using currently available interconnection techniques. In this paper we present novel microfluidic interconnects that can be used in applications involving operating temperatures of up to 275 °C and pressures in excess of 315 Psi (21.43 atm). The only wetted surfaces in this design are teflon, silicon and pyrex glass, making the design inert to most chemicals. High-pressure leakage, pull-out and high-temperature durability tests conducted on the interconnect show that the connections obtained are superior to those reported in the literature using other techniques. Structural analysis of the interconnect is carried out to illustrate the effect of interconnect geometry on strength and high-pressure performance.

[1]  Liwei Lin,et al.  Micro-to-Macro Fluidic Interconnectors With an Integrated Polymer Sealant , 2000, Micro-Electro-Mechanical Systems (MEMS).

[2]  S. R. Kim,et al.  Surface modification of poly(tetrafluoroethylene) film by chemical etching, plasma, and ion beam treatments , 2000 .

[3]  Peter Enoksson,et al.  Micromachined flow-through filter-chamber for chemical reactions on beads , 2000 .

[4]  Weileun Fang,et al.  Micromachined rubber O-ring micro-fluidic couplers , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[5]  Thomas G. Bifano,et al.  Development of a MEMS microvalve array for fluid flow control , 1998 .

[6]  K. R. Williams,et al.  Novel interconnection technologies for integrated microfluidic systems , 1998 .

[7]  H. Kahn,et al.  Thin-film shape-memory alloy actuated micropumps , 1998 .

[8]  Michael P. Harold,et al.  Micromachined reactors for catalytic partial oxidation reactions , 1997 .

[9]  M. Kothare,et al.  Novel microfluidic interconnectors for high temperature and pressure applications , 2003 .

[10]  Aniruddha Puntambekar,et al.  Self-aligning microfluidic interconnects for glass- and plastic-based microfluidic systems , 2002 .

[11]  Mayuresh V. Kothare,et al.  A microreactor for in-situ hydrogen production by catalytic methanol reforming , 2001 .

[12]  Chang Liu,et al.  Re-configurable fluid circuits by PDMS elastomer micromachining , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[13]  R. Cook,et al.  Concepts and Applications of Finite Element Analysis , 1974 .