论文信息 - Resist degradation under plasma exposure: Synergistic effects of ion bombardment

Resist degradation under plasma exposure: Synergistic effects of ion bombardment

Bulk resist degradation under O2 or Ar plasma exposure is experimentally demonstrated. The degradation mechanisms are analyzed in Ar plasma and a synergistic effect of ion bombardment is presented. Mechanical effects of ion bombardment lead to a surface degradation of the resist whereas thermal effects allow the extension of the degradation to the bulk. Self‐diffusion of chains is demonstrated which clearly emphasizes the role of the viscoelastic properties in polymer degradation.

[1] T. Tan,et al. Surface mechanisms in O2 and SF6 microwave plasma etching of polymers , 1990 .

[2] A. Ruoff,et al. Reactive ion beam etching of polyimide thin films , 1988 .

[3] J. Pelletier,et al. Self‐biasing effects on plasma etching characteristics of Si and SiO2 , 1988 .

[4] Antoine Durandet,et al. Microwave multipolar plasmas excited by distributed electron cyclotron resonance: concept and performance , 1988 .

[5] C. Oliveri,et al. Esca and reels characterization of electrically conductive polyimide obtained by ion bombardment in the keV range , 1988 .

[6] M. Vasile,et al. Ion bombardment of polyimide films , 1988, 38th Electronics Components Conference 1988., Proceedings..

[7] H. F. Winters. Phenomena produced by ion bombardment in plasma‐assisted etching environments , 1988 .

[8] P. Paniez,et al. The novolak calibration method applied to the GPC analysis of the UV photoresists , 1986 .

[9] Andre Knop,et al. Chemistry and Application of Phenolic Resins , 1984 .

[10] P. Gennes. Scaling Concepts in Polymer Physics , 1979 .

[11] Hisahiko Watanabe,et al. DIFFUSION MEASUREMENT OF TRITIUM LABELED POLYSTYRENE IN POLYMER BULK , 1979 .

[12] F. Bueche. Diffusion of Polystyrene in Polystyrene: Effect of Matrix Molecular Weight , 1968 .

[13] H. Leaderman,et al. Physical properties of polymers , 1962 .

[14] F. Bueche,et al. Viscosity, Self‐Diffusion, and Allied Effects in Solid Polymers , 1952 .