초정밀 마이크로 물성평가를 위한 비전변형률 측정 모듈개발

Researches about micro technology travel lively in these days. Such many researches are concentrated in the field of micro materials and a process field. But properties of micro materials should be known to give results of research developed into still more. In these various material properties, reliability data such as mechanical, optical, thermal property, etc is the basic property. In this paper, it is developed that is Strain measurement module for micro material property system.