Sensors for Process Control

Sensors are one of the key elements for the automation in the manufacturing and process technology. The sensor field is presently within a restructuring process, directed to a stronger utilization of solid state technologies. This restructuring is governed by the utilization of solid state physical effects, by the use of reproducible fabrication techniques, and by the market driving forces. The state of the art of sensors in modern fabrication techniques will be demonstrated in examples, namely for sensors in silicon technology, in thin film technology and in thick film/screen printing technology. Some important physical and technological problems to be solved for the development of new and advanced sensor families will be outlined. Sensor development is strongly directed to the minaturization of devices and to the integration of different sensors to multisensors, as well as the integration between sensors and microelectronics.