论文信息 - Epitaxial silicon films deposited at high rates by gas-jet electron beam plasma CVD - 字舞流文

Epitaxial silicon films deposited at high rates by gas-jet electron beam plasma CVD

A. Cherkov | O. Semenova | R. Sharafutdinov | A. Gutakovskii | L. D. Pokrovsky | V. M. Karsten | S. Khmel’