High-Q passives for mm-wave SiGe applications
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C. Wipf | F. Korndorfer | M. Kaynak | R. Scholz | B. Tillack | Wan-Gyu Lee | Young Soo Kim | Jung Jae Yoo | Jeoung Woo Kim
[1] M. Offenberg,et al. Bosch deep silicon etching: improving uniformity and etch rate for advanced MEMS applications , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).
[2] Yannis Papananos,et al. Systematic analysis and modeling of integrated inductors and transformers in RF IC design , 2000 .
[3] J. Leclercq,et al. Micromachined microwave planar spiral inductors and transformers , 2000 .
[4] S. Wong,et al. Physical modeling of spiral inductors on silicon , 2000 .
[5] Jun-Bo Yoon,et al. CMOS-compatible surface-micromachined suspended-spiral inductors for multi-GHz silicon RF ICs , 2002, IEEE Electron Device Letters.
[6] J. Burghartz,et al. Substrate effects in monolithic RF transformers on silicon , 2002 .
[7] P.C.H. Chan,et al. Silicon-based high-Q inductors incorporating electroplated copper and low-K BCB dielectric , 2002, IEEE Electron Device Letters.
[8] Zhenghe Feng,et al. Enhancement of quality factor in RF-MEMS spiral inductors by etching out substrate , 2002, 2002 3rd International Conference on Microwave and Millimeter Wave Technology, 2002. Proceedings. ICMMT 2002..
[9] E. Yoon,et al. 3-D construction of monolithic passive components for RF and microwave ICs using thick-metal surface micromachining technology , 2003 .
[10] Jun-Seok Kim,et al. High performance RF integrated passive devices on thick oxide substrate using Cu‐BCB process , 2003 .
[11] Jun‐Bo Yoon,et al. Experimental analysis of the effect of metal thickness on the quality factor in integrated spiral inductors for RF ICs , 2004 .
[12] Yong Zhou,et al. Fabrication and performance of a novel suspended RF spiral inductor , 2004 .
[13] Xi-Ning Wang,et al. Fabrication and performance of a novel suspended RF spiral inductor , 2004, IEEE Transactions on Electron Devices.
[14] P. Pons,et al. MEMS SiGe technologies for advanced wireless communications , 2004, 2004 IEE Radio Frequency Integrated Circuits (RFIC) Systems. Digest of Papers.
[15] F. Ayazi,et al. Characterization of high-Q spiral inductors on thick insulator-on-silicon , 2005 .
[16] Changhai Wang,et al. Theoretical and Experimental Studies of Flip-Chip Assembled High- $Q$ Suspended MEMS Inductors , 2007, IEEE Transactions on Microwave Theory and Techniques.