论文信息 - The impact of sub monolayers of HfO2 on the device performance of high-K based transistors - 字舞流文

The impact of sub monolayers of HfO2 on the device performance of high-K based transistors

Luigi Pantisano | Marc Heyns | Yasuhiro Shimamoto | S. De Gendt | L. Ragnarsson | M. Heyns | L. Pantisano | S. Gendt | Y. Shimamoto | Lars-Ake Ragnarsson | Kaushik | Si Saito | S. Saito