论文信息 - MEMS acoustic emission sensor with mechanical noise rejection

MEMS acoustic emission sensor with mechanical noise rejection

The presented paper describes the use of a new approach to develop a high frequency acceleration sensor with good low frequency noise rejection and in contrast to conventional resonant sensors a short settling time, as it is needed for acoustic emission testing.

[1] Karla Hiller,et al. Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators , 2005, SPIE MOEMS-MEMS.

[2] Christian U. Grosse,et al. Monitoring techniques based on wireless AE sensors for large structures in civil engineering , 2003 .

[3] Adrian A. Pollock,et al. Waveforms and Frequency Spectra of Acoustic Emissions , 1971 .

[4] Masayasu Ohtsu,et al. Acoustic Emission Testing , 2006, Advanced Materials Research.

[5] Jan Mehner,et al. Electrostatic force coupling of MEMS oscillators for spectral vibration measurements , 2008 .

[6] Vijay K. Varadan,et al. Microsensors and MEMS for health monitoring of composite and aircraft structures in flight , 1999, Smart Structures.