Anodization of aluminum to inhibit hillock growth during high temperature processing
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[1] W. B. Pennebaker. Hillock Growth and Stress Relief in Sputtered Au Films , 1969 .
[2] C. J. Santoro,et al. Thermal Cycling and Surface Reconstruction in Aluminum Thin Films , 1969 .
[3] T. Oi,et al. Hillock-free aluminum thin films for electronic devices , 1971 .
[4] J. Black,et al. Electromigration—A brief survey and some recent results , 1969 .
[5] R. S. Keen,et al. Advantages of vapor-plated phosphosilicate films in large-scale integrated circuit arrays , 1970 .
[6] A. Witt,et al. Microscopic Rates of Growth in Single Crystals Pulled from the Melt: Indium Antimonide , 1968 .