Direct growth of graphene/hexagonal boron nitride stacked layers.

Graphene (G) and atomic layers of hexagonal boron nitride (h-BN) are complementary two-dimensional materials, structurally very similar but with vastly different electronic properties. Recent studies indicate that h-BN atomic layers would be excellent dielectric layers to complement graphene electronics. Graphene on h-BN has been realized via peeling of layers from bulk material to create G/h-BN stacks. Considering that both these layers can be independently grown via chemical vapor deposition (CVD) of their precursors on metal substrates, it is feasible that these can be sequentially grown on substrates to create the G/h-BN stacked layers useful for applications. Here we demonstrate the direct CVD growth of h-BN on highly oriented pyrolytic graphite and on mechanically exfoliated graphene, as well as the large area growth of G/h-BN stacks, consisting of few layers of graphene and h-BN, via a two-step CVD process. The G/h-BN film is uniform and continuous and could be transferred onto different substrates for further characterization and device fabrication.

[1]  S. Xiao,et al.  Intrinsic and extrinsic performance limits of graphene devices on SiO2. , 2007, Nature nanotechnology.

[2]  T. Greber,et al.  Formation of single layer h-BN on Pd(1 1 1) , 2006 .

[3]  C. H. Perry,et al.  Normal Modes in Hexagonal Boron Nitride , 1966 .

[4]  C. Oshima,et al.  PHONON DISPERSION OF AN EPITAXIAL MONOLAYER FILM OF HEXAGONAL BORON NITRIDE ON NI(111) , 1997 .

[5]  S. Sarma,et al.  Carrier transport in two-dimensional graphene layers. , 2006, Physical review letters.

[6]  U. Starke,et al.  Raman spectra of epitaxial graphene on SiC and of epitaxial graphene transferred to SiO2. , 2008, Nano letters.

[7]  C N R Rao,et al.  Graphene analogues of BN: novel synthesis and properties. , 2010, ACS nano.

[8]  Ki-Bok Kim,et al.  Observation of a hexagonal BN surface layer on the cubic BN film grown by dual ion beam sputter deposition , 1997 .

[9]  W. Auwärter,et al.  Boron Nitride Nanomesh , 2004, Science.

[10]  T. Tanaka,et al.  A hetero-epitaxial-double-atomic-layer system of monolayer graphene/monolayer h-BN on Ni(111) , 2000 .

[11]  S. Banerjee,et al.  Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils , 2009, Science.

[12]  M. Jiang,et al.  Direct growth of few layer graphene on hexagonal boron nitride by chemical vapor deposition , 2011 .

[13]  Jing Kong,et al.  Synthesis of few-layer hexagonal boron nitride thin film by chemical vapor deposition. , 2010, Nano letters.

[14]  T. Ando Screening Effect and Impurity Scattering in Monolayer Graphene(Condensed matter: electronic structure and electrical, magnetic, and optical properties) , 2006 .

[15]  Deep Jariwala,et al.  Atomic layers of hybridized boron nitride and graphene domains. , 2010, Nature materials.

[16]  W. Stickle,et al.  Handbook of X-Ray Photoelectron Spectroscopy , 1992 .

[17]  Jun Lou,et al.  Large scale growth and characterization of atomic hexagonal boron nitride layers. , 2010, Nano letters.

[18]  Andre K. Geim,et al.  The rise of graphene. , 2007, Nature materials.

[19]  Zheng Yan,et al.  Growth of graphene from solid carbon sources , 2010, Nature.

[20]  Jannik C. Meyer,et al.  The two-dimensional phase of boron nitride: Few-atomic-layer sheets and suspended membranes , 2008 .

[21]  H. Over,et al.  Self-assembly of a hexagonal boron nitride nanomesh on Ru(0001). , 2007, Langmuir : the ACS journal of surfaces and colloids.

[22]  Pablo Jarillo-Herrero,et al.  Scanning tunnelling microscopy and spectroscopy of ultra-flat graphene on hexagonal boron nitride. , 2011, Nature materials.

[23]  P. Ajayan,et al.  Novel Liquid Precursor-Based Facile Synthesis of Large-Area Continuous, Single, and Few-Layer Graphene Films , 2010 .

[24]  R. Piner,et al.  Transfer of large-area graphene films for high-performance transparent conductive electrodes. , 2009, Nano letters.

[25]  R. F. Davis,et al.  Phase evolution in boron nitride thin films , 1993 .

[26]  A. MacDonald,et al.  Bose–Einstein condensation of excitons in bilayer electron systems , 2004, Nature.

[27]  Andre K. Geim,et al.  Electric Field Effect in Atomically Thin Carbon Films , 2004, Science.

[28]  A. Reina,et al.  Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. , 2009, Nano letters.

[29]  N. Goldsman,et al.  Electron transport and full-band electron-phonon interactions in graphene , 2008 .

[30]  Kentaro Nomura,et al.  Quantum transport of massless Dirac fermions. , 2007, Physical review letters.

[31]  Nagashima,et al.  Electronic dispersion relations of monolayer hexagonal boron nitride formed on the Ni(111) surface. , 1995, Physical review. B, Condensed matter.

[32]  S. Xiao,et al.  Intrinsic and extrinsic performance limits of graphene devices on SiO 2 , 2008 .

[33]  K. Shepard,et al.  Boron nitride substrates for high-quality graphene electronics. , 2010, Nature nanotechnology.

[34]  Nagashima,et al.  Electronic structure of monolayer hexagonal boron nitride physisorbed on metal surfaces. , 1995, Physical review letters.

[35]  Andre K. Geim,et al.  Raman spectrum of graphene and graphene layers. , 2006, Physical review letters.

[36]  N. Mårtensson,et al.  Monolayer of h-BN chemisorbed on Cu(111) and Ni(111): The role of the transition metal 3d states , 2005 .