Morphological, Structural and Optical Properties of W Doped-ZnO Films Grown by Pulsed Laser Deposition onto Different Glass Substrates

Tungsten-doped zinc oxide thin films were prepared by ablating a target containing 1 wt% WO3 with XeCl excimer laser (λ=3O8 nm). The films were grown onto different glass substrate at a repetition rate of 10Hz, pulse energy of 100 mJ and irradiation time of 20 min. The structural and optical properties of the films are found to be strongly dependent on the nature of the substrate. The X-ray Diffraction (XRD) results show that all the films are preferentially C-axis oriented. The room temperature photoluminescence (PL) spectrum shows a dominant near-band-edge emission peak for the film deposited on borosilicate and GGG substrate. The average transmittance was found to be in the range of 84-90%. The absorption coefficient exhibits a direct bandgap feature with some band tailing effects.